Adsorption test device
A test device and adsorption technology, applied in the direction of the casing of the measurement device, can solve the problems of increasing the detection time and increasing the detection cost, and achieve the effect of reducing the probability of air leakage and reducing the test time and cost.
Active Publication Date: 2020-02-18
致茂电子(苏州)有限公司
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Problems solved by technology
However, the aforementioned additional airtight test will not only increase the detection cost but also increase the detection time
Method used
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[0040] Below in conjunction with accompanying drawing, structural principle and working principle of the present invention are specifically described:
[0041] see Figure 1 to Figure 3 . figure 1 It is a schematic cross-sectional view of the adsorption testing device according to the first embodiment of the present invention. figure 2 for figure 1 The decomposition diagram. image 3 for figure 2 A partially enlarged schematic diagram.
[0042] The adsorption testing device 10 of this embodiment is used to carry a carrier plate 20 . The adsorption testing device 10 includes a carrying platform 100 , an electrical conductive element 200 , a first sealing ring 300 and a conductive probe 400 .
[0043] The carrying platform 100 includes an annular base 110 and an annular flange 120 . The annular seat 110 has a top surface 111 , a back surface 112 , a through groove 113 and an inner wall 114 forming the through groove 113 . The through groove 113 extends from the top sur...
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An adsorption-type test device comprises a bearing table, an electrical conduction member, a sealing ring and a conducting probe. The bearing table comprises a top surface, a back surface and a penetrating groove. The back surface is opposite to the top surface; the penetrating groove is extended to the back surface from the top surface; the electrical conduction member comprises a plate body anda plurality of conductive elastic arms; the plate body is located at the penetrating groove and is embedded in the bearing table to distinguish an absorption area and a holding area; the conductive elastic arms penetrate the plate body; the sealing ring is arranged at the top surface and encircles the absorption area; the sealing ring is configured to bear a carrying plate; one end of the electrical conduction member is located at the absorption area and is configured to electrically connect with the carrying plate; the conducting probe is located at in the penetrating groove; the conducting probe comprises a rack body and a plurality of probe heads; the rack body is fixed at the carrying table; and the other ends of the conductive elastic arms are located at the holding area and are respectively electrically connected with the probe heads.
Description
technical field [0001] The invention relates to a test device, in particular to an adsorption test device. Background technique [0002] With the advancement of technology, the functions of semiconductor components are also changing with each passing day, and the functions carried are becoming more and more diverse. Traditionally, before semiconductor components leave the factory, testing procedures are often used to confirm that all functions of the semiconductor components are normal. [0003] Generally speaking, a semiconductor device with an integrated circuit is placed on a carrier platform for testing. In detail, a plurality of test circuit boards and a plurality of retractable electrical connection terminals (pogo pins) are arranged on the carrying platform. In addition, a carrier board is provided on the carrier platform, and electrical contacts are provided on the carrier board to electrically connect with the semiconductor element. Before testing the semiconduct...
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IPC IPC(8): G01R1/04
CPCG01R1/04
Inventor 郑柏凱
Owner 致茂电子(苏州)有限公司