State Diagnosis and Evaluation Method of Heating Element and Its Application
A heating element and state diagnosis technology, which is applied in the direction of electrical components, data processing applications, special data processing applications, etc., can solve problems such as process failure, cost waste, and the inability to clearly know whether the life state of the heating element has reached the standard that needs to be replaced.
Active Publication Date: 2021-11-26
IND TECH RES INST
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Problems solved by technology
However, with the diversification and complexity of process formulas, it is difficult to conduct comprehensive monitoring of each process, and it is impossible to clearly know whether the current life state of the heating element has reached the standard that needs to be replaced
If the heating element is replaced before it reaches the replacement standard, it will cause cost waste. If it has reached the replacement standard but is not replaced, it may cause problems such as process failure
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[0041] The embodiment disclosed in this specification relates to a state diagnosis and failure prediction method of a heating element and its application, which can be used to estimate the remaining life of the heating element and the replacement time point, and solve the problem of heating elements caused by early replacement or failure to replace the heating element in the process. The problem of cost waste or process failure caused by components. In order to make the above objects, features and advantages of the present invention more comprehensible, a number of preferred embodiments are enumerated and described in detail below with the accompanying drawings.
[0042] However, it must be noted that these specific implementation cases and methods are not intended to limit the present invention. The invention can still be implemented with other features, elements, methods and parameters. The proposal of the preferred embodiment is only used to illustrate the technical charac...
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A method for diagnosing and evaluating the state of a heating element includes the following steps: firstly, collecting a plurality of historical operation data of a heating element under test. Wherein, each piece of operation data includes a temperature, an operation sequence and a resistance value. Then, the historical operation data of multiple segments corresponding to a temperature range is extracted from the historical operating data to obtain a resistance-operating sequence characteristic curve. The resistance-operating sequence characteristic curve is then used to determine whether the heating element under test has failed, to predict whether subsequent operation of the heating element under test will fail, or to predict the remaining life of the heating element under test.
Description
technical field [0001] The invention relates to a method for state diagnosis and failure prediction of process components and its application. Background technique [0002] In the semiconductor and other electronic component manufacturing industries, the temperature formula of the heating element of the heating machine in the process is generally set according to the linear relationship between the temperature of the heating element and the current or voltage. However, with the diversification and complexity of process recipes, it is difficult to conduct a comprehensive monitoring of each process, and it is impossible to clearly know whether the current life state of the heating element has reached the standard that needs to be replaced. If the heating element is replaced before it reaches the replacement standard, it will cause cost waste. If it has reached the replacement standard but is not replaced, it may cause problems such as process failure. [0003] Therefore, ther...
Claims
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IPC IPC(8): G06T11/20G06F16/2458G06Q10/06G06F30/20G06K9/62
CPCG06F30/20G06F18/243H05B1/0233G05B23/024G05B23/0283
Inventor 古宏麒谢宗融许耀中
Owner IND TECH RES INST