High-transmission terahertz phase shifter based on metamaterials
A high transmission, terahertz technology, applied in the field of terahertz wave phase shifters, to achieve the effect of simple design principle, low loss and simple structure
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[0017] In this embodiment, the structure of the metamaterial-based high-transmission terahertz phase shifter is as described above ( Figure 1~2 ),No longer. However, the specific parameters of each component are as follows: the silicon base layer 1 has a width of 56 μm, a length of 56 μm, and a thickness of 48 μm. The first dielectric layer 2 of BCB material has a length of 56 μm, a width of 56 μm, and a thickness of 6.5 μm. The second dielectric layer 4 of BCB material has a length of 56 μm, a width of 56 μm, and a thickness of 32 μm. The third dielectric layer 6 of BCB material has a length of 56 μm, a width of 56 μm, and a thickness of 9 μm. The fourth dielectric layer 8 of BCB material has a length of 56 μm, a width of 56 μm, and a thickness of 68 μm. The material of each layer of non-split ring resonant structure is metal aluminum film, the overall length is 56 μm, the overall width is 56 μm, and the overall thickness is 0.3 μm; the first unsplit ring resonant structu...
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