A six-degree-of-freedom series-parallel hybrid drive motion platform for optoelectronic packaging
A motion platform, hybrid drive technology, applied in circuits, electrical components, program-controlled manipulators, etc., can solve the problems of large volume, small motion stroke, low motion accuracy, etc., achieve small overall size, achieve precise positioning, and achieve large strokes The effect of range of motion
Active Publication Date: 2020-06-09
CENT SOUTH UNIV
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Problems solved by technology
[0004] The purpose of the present invention is to provide a six-degree-of-freedom series-parallel hybrid drive motion platform, which solves the technical problems of the six-degree-of-freedom motion platform in the prior art, which are large in volume, low in motion accuracy, and small in motion stroke
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[0046] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments It is a part of embodiments of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts fall within the protection scope of the present invention.
[0047] figure 1 It is a schematic structural diagram of a six-degree-of-freedom series-parallel hybrid drive motion platform according to an embodiment of the present invention, as shown in figure 1 As shown, the embodiment of the present invention provides a six-degree-of-freedom series-parallel hybrid drive motion platform, including:
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The invention provides a six-freedom-degree serial-parallel connection hybrid driving motion platform applied to optoelectronic packaging. The motion platform comprises a three-freedom-degree flexibleparallel-connection secondary motion platform, a single-freedom-degree rotating secondary motion platform and a two-freedom-degree serial-connection secondary motion platform; the single-freedom-degree rotating secondary motion platform is arranged on the two-freedom-degree serial-connection secondary motion platform and is fixedly connected with the two-freedom-degree serial-connection secondarymotion platform; and the three-freedom-degree flexible parallel-connection secondary motion platform is arranged on the single-freedom-degree rotating secondary motion platform and is fixedly connected with the single-freedom-degree rotating secondary motion platform. According to the six-freedom-degree serial-parallel connection hybrid driving motion platform provided by the invention, the parallel-connection secondary motion platform, the rotating secondary motion platform and the serial-connection secondary motion platform are arranged in a mixing manner, so the motion platform is simple and compact in structure, reasonable in layout and capable of realizing a large-spoke motion range and high-precision location.
Description
technical field [0001] The invention relates to the technical field of optoelectronic packaging, in particular to a six-degree-of-freedom series-parallel hybrid drive motion platform applied to optoelectronic packaging. Background technique [0002] Integrated optoelectronic devices are the core devices supporting the rapid development of optical fiber communication in the new century. Optoelectronic packaging is a process of aligning and coupling input and output array optical fibers and optical chips through a six-degree-of-freedom motion platform under the guidance of visual equipment. The motion platform is a platform for positioning chips and optical fibers in the optoelectronic packaging system, and plays an extremely important role in optoelectronic packaging. In the process of optoelectronic packaging, in order to achieve the maximum power coupling of the optical channel and thus transmit the optical signal with high efficiency, the motion platform needs to achieve ...
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IPC IPC(8): B25J9/00H01L31/18
CPCB25J9/0072H01L31/18Y02P70/50
Inventor 段吉安周海波侯富龙孔志平张威
Owner CENT SOUTH UNIV