Method for verifying welding quality of MEMS microphone

A technology of welding quality and verification method, which is applied in the field of microphones, can solve problems such as welding cracks and delamination that are difficult to find, and achieve the effect of improving convenience

Active Publication Date: 2018-07-20
WEIFANG GOERTEK MICROELECTRONICS CO LTD
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Problems solved by technology

[0005] In view of the above problems, the purpose of the present invention is to provide a method for verifying the welding quality of MEMS microp

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  • Method for verifying welding quality of MEMS microphone
  • Method for verifying welding quality of MEMS microphone

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Embodiment Construction

[0029] In the following description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of one or more embodiments. It may be evident, however, that these embodiments may be practiced without these specific details.

[0030] In view of the existing welding quality inspection methods proposed above, there are problems such as welding cracks and delaminations that are difficult to find. The present invention provides a method for verifying the welding quality of MEMS microphones. This method can effectively improve the convenience, reliability and inspection of welding quality inspections. efficiency.

[0031] Specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0032] In order to illustrate the verification method of MEMS microphone welding quality that the present invention provides, figure 1 The process flow of the method for verifying t...

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Abstract

The invention provides a method for verifying the welding quality of an MEMS microphone. The method comprises the following steps: fixing an airtight tool to the MEMS microphone, wherein the airtighttool comprises a piston and a push rod connected with the piston, the piston corresponds to a sound hole of the MEMS microphone, and the airtight tool is used for compressing the air in a package structure of the MEMS microphone; testing the air pressure in the package structure through a barometer module arranged in the package structure; judging the welding quality of the MEMS microphone according to an air pressure change value obtained by the test of the barometer module and a preset air pressure; if the air pressure change value obtained by the test of the barometer module is greater thanthe preset air pressure, indicating that the welding quality of the MEMS microphone is qualified; and if the air pressure change value obtained by the test of the barometer module is less than the preset air pressure, indicating that the welding quality of the MEMS microphone is unqualified. According to the method provided by the invention, the problems that welding cracks are generated and thatdelamination is difficult to find in the existing welding quality inspection methods can be solved.

Description

technical field [0001] The invention relates to the technical field of microphones, and more specifically, to a method for verifying welding quality of MEMS microphones. Background technique [0002] MEMS (Microelectromechanical Systems, microelectromechanical systems) microphone is a kind of electric energy sound transducer manufactured by micromachining technology, which has the characteristics of small size, good frequency response characteristics, and low noise. With the miniaturization and thinning of electronic devices, MEMS microphones are more and more widely used in these devices. [0003] When welding the sound hole at the bottom of the MEMS microphone, it is necessary to ensure a good sealing welding around the sound hole to avoid sound leakage and reduce the performance of the MEMS microphone product; the current common practice is to use X-ray to inspect the welding quality of the product, but this inspection method is difficult Hidden dangers such as welding c...

Claims

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Application Information

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IPC IPC(8): H04R19/04H04R29/00
CPCH04R19/04H04R29/00
Inventor 端木鲁玉
Owner WEIFANG GOERTEK MICROELECTRONICS CO LTD
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