Composite patterned substrate using low-refractive index material as medium and manufacturing method thereof

A low-refractive index, graphics substrate technology, applied in the direction of electrical components, circuits, semiconductor devices, etc., can solve problems such as difficulties, and achieve the effects of saving growth time, increasing output rate, and improving light extraction efficiency
CN108346718AInactive Publication Date: 2018-07-31合肥彩虹蓝光科技有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
合肥彩虹蓝光科技有限公司
Publication Date
2018-07-31
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention provides a composite patterned substrate using a low-refractive index material as a medium and a manufacturing method thereof. The manufacturing method comprises the following steps: S1,a sapphire substrate is provided, and a low-refractive index medium layer is deposited on the surface of the sapphire substrate, wherein the refractive index of the low-refractive index medium layeris smaller than 1.8; S2, the low-refractive index medium layer is etched to obtain a depressed structure, and the depressed structure exposes the sapphire substrate; and S3, an AlxGa1-xN buffer layergrows on the surface of the sapphire substrate exposed in the depressed structure to obtain a composite patterned substrate, wherein 0< / =X< / =1. The composite patterned substrate reduces refraction oflight inside the chip, light reflection is improved, the extraction efficiency of an LED chip is improved, the production efficiency can be improved, and the production cost is reduced.
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Description

technical field

[0001] The invention relates to the field of semiconductor materials, in particular to a composite pattern substrate using low-refractive-index material as a medium and a manufacturing method thereof. Background technique

[0002] Semiconductor light-emitting diodes (light-emission diodes, LEDS) have the advantages of small size, low energy consumption, long life, environmental protection and durability. Blue and green GaN-based LED chips have developed rapidly in the field of display and lighting; domestic LED lighting has replaced The share of general lighting is about 30%. In order to continue to increase the penetration rate of LED in the lighting market, it is necessary to continue to improve the performance of LED in terms of brightness and light quality. At present, more than 95% of mainstream blue-green GaN-based LED epitaxial wafers use sapphire substrates as substrate materials. Sapphire substrates will still be the most important in the mainstream ...

Claims

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