Redundant drive planar motion platform applied to optoelectronic packaging

A motion platform and planar motion technology, which is applied in the direction of circuits, electrical components, sustainable manufacturing/processing, etc., can solve problems such as increasing the load of linear motors, the impact of motion speed, acceleration, and start-stop accuracy, and reducing the efficiency and accuracy of optoelectronic packaging. , to achieve the effect of improving efficiency and precision, small size and high acceleration

Active Publication Date: 2018-09-04
CENT SOUTH UNIV
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Problems solved by technology

[0004] The above-mentioned traditional motion platform increases the load corresponding to the linear motor in the Y (or X) direction because the moving components in the X (or Y) direction are mounted on the moving components in the Y (or

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  • Redundant drive planar motion platform applied to optoelectronic packaging
  • Redundant drive planar motion platform applied to optoelectronic packaging
  • Redundant drive planar motion platform applied to optoelectronic packaging

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[0021] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0022] like figure 1 As shown, according to one aspect of the present invention, a redundantly driven planar motion platform applied to optoelectronic packaging is provided, including: an object stage 10 and symmetrically arranged on the object stage 10 along the first direction and the second direction, respectively. Linear motors 20 on both sides; the linear motors 20 arranged symmetrically on both sides of the stage 10 along the first direction are used to drive the stage 10 to move along the second direction; arranged symmetrically along the second direction The linear motors 20 on both sides of the object stage 10 are used to drive the object stage 10 to move along a...

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Abstract

The present invention provides a redundant drive planar motion platform applied to optoelectronic packaging. The platform comprises an objective table, and linear motors respectively symmetrically arranged at four sides of the objective table in a first direction and a second direction; the linear motors symmetrically arranged at two sides of the objective table in the first direction are configured to drive the objective table to move in the second direction; the linear motors symmetrically arranged at two sides of the objective table in the second direction are configured to drive the objective table to move in the first direction. The redundant drive planar motion platform avoids the condition that motion members are carried to increase the load of the linear motors and allows the motion speeds, the accelerated speeds and the start-stop precision of the linear motors not to be influenced. The linear motors are symmetrically arranged, the number of the linear motors are double to provide a faster motion speed, a large accelerated speed and a high start-stop precision for the objective table so as to improve the efficiency and the precision of the optoelectronic packaging.

Description

technical field [0001] The invention relates to the technical field of optoelectronic packaging, and more specifically, to a redundantly driven planar motion platform applied to optoelectronic packaging. Background technique [0002] Optoelectronic devices are the core devices in optical fiber communication, and they need to be connected to the input array optical fiber and output array optical fiber respectively during specific use. The connection between the optoelectronic device and the input array optical fiber and the output array optical fiber is an optoelectronic package. Optoelectronic packaging is the process of optically aligning and coupling optoelectronic devices with input array fibers or output array fibers using the load clamping mechanism on the motion platform. Among them, the motion speed, acceleration and start-stop accuracy of the motion platform determine the efficiency and accuracy of optoelectronic packaging. [0003] The traditional motion platform ...

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Application Information

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IPC IPC(8): H01L31/18H01L21/68
CPCH01L21/68H01L31/1876Y02P70/50
Inventor 段吉安周海波张威孔志平侯富龙
Owner CENT SOUTH UNIV
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