ICF (inertial confinement fusion) target assembly parameter measuring multi-freedom degree precision motion platform device
A technology of parameter measurement and precision movement, applied in the direction of measuring devices, optical devices, instruments, etc., to achieve the effect of simple operation, high integration and stable control
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[0020] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.
[0021] Such as Figure 1-Figure 3 As shown, the ICF target assembly parameter measurement multi-degree-of-freedom precision motion platform device provided by the present invention is composed of the ICF target parameter measurement three-dimensional translation system 1, the ICF target parameter three-dimensional monitoring system 2, the ICF target posture double-rotation precision adjustment system 3 and the above-mentioned The vibration isolation platform 4 of the three systems consists of four parts, among which:
[0022] The ICF target posture dou...
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