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Device and method for optical free-form surface interference detection with high precision and large dynamic range

A technology of large dynamic range and interference detection, which is applied in the direction of using optical devices, measuring devices, instruments, etc., to reduce the detection pressure, ensure the detection accuracy, and increase the detection dynamic range.

Active Publication Date: 2019-06-21
ANHUI UNIVERSITY
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  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a high-precision, large dynamic range optical free-form surface interference detection device and method to solve the difficulty of traditional interferometers in detecting non-rotationally symmetric phase wavefronts reflected by non-rotationally symmetric free-form surfaces

Method used

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  • Device and method for optical free-form surface interference detection with high precision and large dynamic range
  • Device and method for optical free-form surface interference detection with high precision and large dynamic range
  • Device and method for optical free-form surface interference detection with high precision and large dynamic range

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Embodiment

[0051] An example of the application of the present invention to an optical free-form surface interference detection method with high precision and large dynamic range is described as follows.

[0052] The measured free-form surface L13 is a double-curvature surface, and the radius of curvature in the x direction is 251mm; the radius of curvature in the y direction is 248mm. Its nominal shape can be decomposed into Zernike astigmatism and spherical aberration terms.

[0053] The non-zero interference detection system A1 uses the polarized thin beam emitted by the He-Ne frequency-stabilized polarization laser L1 to be expanded into a wide-beam parallel light (20mm) by the collimator beam-expanding system L2. Such as image 3 As shown, the polarization direction of the parallel light is parallel to the paper surface, which is denoted as s-ray. The parallel s-light propagates forward to the ordinary beam splitter L3 and is divided into reflection and transmission light, and the...

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Abstract

The invention adopts an optical free-form surface interference detecting device and an optical free-form surface interference detecting method with high precision and a large dynamic range. The optical free-form surface interference detecting device and the optical free-form surface interference detecting method adopt a novel detection structure, utilize a self-adaptive optical component: a deformable mirror (DM) to bear low-order aberration introduced by a free-form surface, monitor deformation wavefront of the DM by means of a Shack-Hartmann wavefront sensor in real time, then utilize a specially-designed optical path structure to transmit a high-order wavefront phase containing surface-shape errors of the free-form surface into an interferometer for detection, thus reduce the detectionpressure of the interferometer, increase the detection dynamic range, ensure the detection precision of high-order aberration, and effectively solve the contradiction that the dynamic range and detection precision in free-form surface detection cannot be achieved simultaneously.

Description

technical field [0001] The invention relates to the field of optical curved surface detection, in particular to an optical free-form surface interference detection device and method with high precision and large dynamic range. Background technique [0002] Due to its large surface freedom, optical free-form surface components can balance different on-axis or off-axis aberrations in a targeted manner, and at the same time meet the requirements of high performance, light weight and miniaturization of modern optical systems. The new favorite in the industrial and commercial fields. Optical free-form surfaces in a narrow sense refer to non-rotational symmetric aspheric surfaces with different curvature radii throughout the aperture. It is difficult to use a unified mathematical equation to describe its surface shape within the entire aperture. Since optical freeform surfaces generally have irregular shapes, which can provide a high degree of freedom in aberrations, or complex l...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 张磊李劲松俞本立
Owner ANHUI UNIVERSITY
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