Reflective spatial filter debugging device and method
A space filter and reflective technology, which is applied in measuring devices, radiation pyrometry, instruments, etc., can solve problems such as space filter blocking, damage to laser drivers, and reduced safe operation of laser drivers, so as to improve the level of debugging , high wavefront measurement accuracy and simple structure
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[0032] The present invention will be further described below in conjunction with the accompanying drawings and embodiments, but the protection scope of the present invention should not be limited thereby.
[0033] Such as figure 1 As shown, a debugging device for a reflective spatial filter includes a wide-spectrum fiber optic point light source 1, an achromatic collimator lens group 2, a first reflector 4, a second reflector 5, an achromatic beam shrinker lens group 11, Wavefront sensor 8, acquisition computer 9 and vacuum unit 10.
[0034] The optical elements along the beam direction output by the wide-spectrum fiber optic point light source 1 are the achromatic collimator lens group 2, the reflective spatial filter 3 to be debugged, the first mirror 4, and the second mirror 5. , Achromatic contraction lens group 11, wavefront sensor 8.
[0035] The wide-spectrum fiber optic point light source 1 is located at the focal point of the achromatic collimating lens group 2, and t...
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