Deposition mask and deposition apparatus using same

A mask and surface hole technology, applied in the field of deposition mask and deposition equipment using the deposition mask, can solve the problems of decreased deposition uniformity, large shadow effect, etc.

Active Publication Date: 2018-10-23
LG DISPLAY CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] Due to the nature of the deposition equipment used during the deposition process, electronic devices with larger areas can have larger shadowing effects due to deposition masks, which can degrade deposition uniformity

Method used

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  • Deposition mask and deposition apparatus using same
  • Deposition mask and deposition apparatus using same
  • Deposition mask and deposition apparatus using same

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Embodiment Construction

[0024] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. The following embodiments are provided by way of examples so that the idea of ​​the present disclosure can be fully conveyed to those skilled in the art. Therefore, the present disclosure is not limited to the embodiments described below, but may be implemented in other forms. In addition, in the drawings, for convenience of description, the size, thickness, etc. of the device may be shown exaggeratedly. Throughout the specification, the same reference numerals designate the same elements.

[0025] The advantages and features of the present disclosure and implementation methods thereof will be apparent by referring to the following embodiments described in detail in conjunction with the accompanying drawings. However, the present disclosure is not limited to the embodiments set forth below, but can be implemented in various forms. The following ...

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Abstract

The invention provides a deposition mask and a deposition apparatus using the same. A deposition mask can include a base member including a first surface and a second surface which are divided into afirst region, a second region and a third region; a first opening in the first region; a second opening in the second region; and a third opening in the third region, in which each of the first, second and third openings can have a cross-section having an hourglass shape, in which the hourglass shapes of the first and third openings lean away from the second opening relative to the second surfaceof the base member. In this way, a shadow effect can be minimized during a deposition process and deposition uniformity can be improved.

Description

technical field [0001] Embodiments of the present invention relate to a deposition mask applicable to a deposition process and a deposition apparatus using the deposition mask. Background technique [0002] According to the development towards the information society, it is necessary to develop electronic devices such as new display devices, lighting devices, semiconductor devices, and the like. [0003] The electronic device as described above includes at least one substrate, and a plurality of fine patterns are arranged on the substrate. In order to form fine patterns, a deposition process is performed using a deposition mask including a plurality of openings using a deposition device. [0004] Due to the nature of the deposition equipment used during the deposition process, electronic devices having larger areas may have larger shadowing effects due to the deposition mask, which degrades deposition uniformity. Accordingly, a deposition mask and a deposition apparatus us...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C16/04
CPCC23C14/042C23C16/042H10K71/166H10K71/00H10K71/191H10K71/231
Inventor 张锡洛朴铉淑金钟宪
Owner LG DISPLAY CO LTD
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