Macro-micro combined adjustment device

Abstract

The invention discloses a macro-micro combined adjustment device. The macro-micro combined adjustment device comprises a first movable surface, a second movable surface connected to the first movablesurface, a hydraulic driving mechanism connected to the first movable surface and a piezoelectric driving mechanism connected to the second movable surface. The piezoelectric driving mechanism includes a ceramic driver, a connecting mechanism connected to the ceramic driver and a connecting block connected to the connecting mechanism. The connecting mechanism is connected to the ceramic driver andthe connecting block separately. According to the macro-micro combined adjustment device, coarse adjustment of the first movable surface is realized by the hydraulic driving mechanism, and fine adjustment of the second movable surface is realized by the piezoelectric driving mechanism; and adjustment can be performed according to the actual needs, the hydraulic driving mechanism and / or the piezoelectric driving mechanism is selected to achieve the attitude adjustment, the adjustment accuracy is high, and the market demand for high difficult adjustment is met.

Description

technical field [0001] The invention relates to the technical field of displacement driving equipment, in particular to an adjustment device combining macro and micro. Background technique [0002] For some displacement settings, such as automobiles, airplanes, etc., the adjustment devices are all driven by one-dimensional macro, that is, mechanical transmission devices, such as precision screw power transmission, linear motors, voice coil motors, etc. The structure of this device is bulky, The accuracy is low, and its accuracy is limited to the millimeter level, which cannot meet the needs of precise adjustment, especially for some small aircraft with many changes in flight attitude; and the micro-drive device represented by piezoelectric ceramics, its positioning accuracy can reach nanometer level , but its stroke can only reach tens of microns, and the adjustment of large stroke cannot be realized. Therefore, it is necessary to use a macro-micro adjustment device to solve...

AI Technical Summary

Problems solved by technology

[0002] For some displacement settings, such as automobiles, airplanes, etc., the adjustment devices are all driven by one-dimensional macro, that is, mechanical transmission devices, such as precision screw power transmission, linear motors, voice coil motors, etc. The structure of this device is bulky, The accuracy is low, and its accuracy is limited to the millimeter level, which cannot meet the needs of precise adjustment, especially for some small aircraft with many changes in flight attitude; and the micro-drive device represented by piezoelectric ceramics, its positioning accuracy can reach nanometer level , but its stroke can only reach tens of microns, and the adjustment of large stroke cannot be realized, so it is necessary to use a macro-micro adjustment device to solve the above problems

[0003] The existing macro-micro-combined composite mechanism is mostly used in the field of machine tools and precision machining. In terms of precision control of the adjustment device, the macro-micro-combined adjustment mechanism is rarely used.

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