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Isosceles right triangle array structure of low temperature drifting resonant micro-accelerometer

A micro-accelerometer, isosceles right-angle technology, applied in the direction of measuring acceleration, velocity/acceleration/impact measurement, acceleration measurement using inertial force, etc., can solve the problems of limited function, high manufacturing cost, low yield rate, etc., to achieve The structure is reasonable, the effect of solving the measurement blind spot and improving the yield rate

Active Publication Date: 2018-11-13
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The present invention provides a low temperature drift resonant micro accelerometer isosceles right triangle array in order to solve the problems of measurement blind area, high manufacturing cost, low yield and limited function when the input acceleration of the existing resonant micro accelerometer is small structure

Method used

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  • Isosceles right triangle array structure of low temperature drifting resonant micro-accelerometer
  • Isosceles right triangle array structure of low temperature drifting resonant micro-accelerometer
  • Isosceles right triangle array structure of low temperature drifting resonant micro-accelerometer

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Embodiment Construction

[0036] A resonant micro-accelerometer with low temperature drift isosceles right-angled triangle array structure, including three single-resonant micro-accelerometers 1 with the same size; the sensitive axes of the three single-resonant micro-accelerometers 1 intersect in the same plane to form an isosceles right triangle;

[0037] The single resonance mechanism micro accelerometer 1 includes a mass block 101 and a resonance mechanism;

[0038] The resonant mechanism includes a left large anchor block 102a, a right large anchor block 102b, a left two large anchor block 103a, a right two large anchor block 103b, a left square corrugated support beam 104a, a right square corrugated support beam 104b, two left square Wave-shaped support beam 105a, right two square wave-shaped support beams 105b, middle anchor block 106, left cross beam 107a, right cross beam 107b, left small anchor block 108a, right small anchor block 108b, double-ended fixed tuning fork 109, left vertical beam 1...

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Abstract

The invention relates to resonant micro-accelerometers, and specifically relates to an isosceles right triangle array structure of a low temperature drifting resonant micro-accelerometer. The problemsthat when input acceleration is low, the existing resonant micro-accelerometer has a measurement blind zone, the manufacture cost is high, the finished product rate is low, and the functions are limited are solved. The isosceles right triangle array structure of the low temperature drifting resonant micro-accelerometer comprises three single resonant mechanism micro-accelerometers of the same size, wherein sensitive axes of the three single resonant mechanism micro-accelerometers cross in the same plane to form an isosceles right triangle, each single resonant mechanism micro-accelerometer comprises a mass block and a resonant mechanism, each resonant mechanism comprises a left first large anchor, a right first large anchor, a left second large anchor, a right second large anchor, a leftfirst square wave-shaped support beam, a right first square wave-shaped support beam, a left second square wave-shaped support beam, a right second square wave-shaped support beam and a middle anchor.The isosceles right triangle array structure of the low temperature drifting resonant micro-accelerometer is suitable for high-grade, high-precision and advanced areas such as military navigation anddeep space exploration.

Description

technical field [0001] The invention relates to a resonant micro-accelerometer, in particular to a low-temperature drift resonant micro-accelerometer with an isosceles right-angled triangle array structure. Background technique [0002] The resonant micro-accelerometer is a high-precision MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) acceleration sensor, which is widely used in high-precision fields such as military navigation and deep space exploration. Under the existing technical conditions, the resonant micro-accelerometer generally adopts a differential structure (including two mass blocks, and each mass block is processed with two resonance mechanisms of the same size), and the differential structure can reduce the temperature drift to a certain extent. , but it has the following problems: First, when the input acceleration is small, the output resonance frequency variation of the two resonance mechanisms on the same mass block is very close, ...

Claims

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Application Information

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IPC IPC(8): G01C21/16G01P15/08
CPCG01C21/16G01P15/08G01P15/0802G01P2015/0862
Inventor 崔敏杨海鹏
Owner ZHONGBEI UNIV
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