Online monitoring device for sheet resistance of metallized film

Abstract

The invention discloses an online monitoring device for the sheet resistance of a metallized film, and the device comprises a measurement and control main unit (1) disposed in a vacuum evaporation chamber, a man-machine interface (2) installed outside the vacuum evaporation chamber, and a vacuum electrode flange (3) which is electrically connected with the interior and exterior of the vacuum evaporation chamber. The measurement and control main unit (1) comprises a rack (11), a controller which is fixedly disposed on a vertical plane of the rack (11), and at least one pair of light source emitter (12) and light source receiver (13) which are fixedly disposed on a horizontal plane of the rack (11). The man-machine interface (2) is fixedly disposed on a control box operation plane outside the evaporation chamber, and the vacuum electrode flange (3) is fixedly disposed on a side wall hole (4) of the vacuum evaporation chamber. The device does not need to make contact with a metal coatinglayer on the metallized film, can reflect the uniformity of the coating layer in real time, and facilitates the improvement of the quality of the coating layer.

Description

technical field [0001] The invention relates to a metallized thin film metal coating thickness gauge, in particular to an on-line monitoring device for the square resistance of a metallized thin film. Background technique [0002] Metallized film is an important material for the production of film capacitors. High-purity metals (such as AL, ZN) are melted, evaporated, and deposited on the dielectric base film in a high vacuum state to form an extremely thin layer of metal on the surface of the dielectric base film. The film after coating is the metallized film; the longitudinal and transverse uniformity of the thickness of the metal coating is an important quality and technical index of the coating product. The thickness of the metal coating on the metallized film is very small and extremely difficult to measure. Usually, the square resistance is used to represent the thickness of the metal coating. Thickness, the resistance value per unit square area is called square resist...

AI Technical Summary

Problems solved by technology

[0002] Metallized film is an important material for the production of film capacitors. High-purity metals (such as AL, ZN) are melted, evaporated, and deposited on the dielectric base film in a high vacuum state to form an extremely thin layer of metal on the surface of the dielectric base film. The film after coating is the metallized film; the longitudinal and transverse uniformity of the thickness of the metal coating is an important quality and technical index of the coating product. The thickness of the metal coating on the metallized film is very small and extremely difficult to measure. Usually, the square resistance is used to represent the thickness of the metal coating. Thickness, the resistance value per unit square area is called square resistance (that is, square resistance, represented by Ω / □); during the coating process, if the uniformity of the coating on the film surface cannot be understood in real time and the production process is adjusted in time, it will affect the coating. Quality, while the square resistance of the metal coating cannot be measured by contact method online

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