Vapor deposition crucible, vapor deposition source and vapor deposition method

A technology of evaporation source and crucible, which is applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of time-consuming and troublesome, and achieve the effect of ensuring stability

Active Publication Date: 2018-11-23
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Embodiments of the present invention provide an evaporation crucible, an evaporation source, and an evaporation method, which can solve the problem of time-consuming and labor-intensive problems in the related art due to the need to adjust the heating power for different evaporation materials

Method used

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  • Vapor deposition crucible, vapor deposition source and vapor deposition method
  • Vapor deposition crucible, vapor deposition source and vapor deposition method
  • Vapor deposition crucible, vapor deposition source and vapor deposition method

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Embodiment Construction

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0030] In describing the present invention, it is to be understood that the terms "center", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", The orientations or positional relationships indicated by "top", "bottom", "inner", "outer", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than in...

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Abstract

The invention discloses a vapor deposition crucible, a vapor deposition source and a vapor deposition method, which relate to the technical field of vapor deposition, and can solve the problem in therelated art that heating power needs to be separately adjusted for different vapor deposition materials, which costs time and labor. The vapor deposition crucible comprises a crucible body, the sidewall of the crucible body is provided with a filling space filled with a filler, and the filling space is separated from a vapor deposition material receiving chamber in the crucible body. The vapor deposition crucible is used in vapor deposition process.

Description

technical field [0001] The invention relates to the technical field of evaporation, in particular to an evaporation crucible, an evaporation source and an evaporation method. Background technique [0002] In the OLED (Organic Light-Emitting Diode, Organic Light-Emitting Diode) display panel, the organic functional layer is produced by vacuum thermal evaporation, that is, the organic material is placed in the crucible, and then the crucible is heated in a vacuum environment to make the organic material in it gas. It can be melted and ejected upwards, so that it can be deposited on the lower temperature substrate above, and an organic functional layer with nanometer thickness can be formed on the substrate. [0003] The specific heat capacity of the current evaporation crucible is fixed. When different evaporation materials are added, the overall heat capacity of the crucible and the evaporation material is different, so the heating curve after the overall heating is different...

Claims

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Application Information

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IPC IPC(8): C23C14/24
CPCC23C14/243
Inventor 孙力
Owner BOE TECH GRP CO LTD
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