Chip cutting system and control circuit thereof

Abstract

The application provides a chip cutting system and a control circuit thereof. In the application, the control circuit of the chip cutting system includes a first relay, a second relay, a monitoring device, and a control board that sequentially form a control loop in series, and further includes a third relay electrically connected to the second relay. When the relay is closed, the foaming machineis energized, when the resistivity of the water output by the foaming machine is within a preset range, the third relay is turned off, the second relay and the control loop are closed, the monitoringdevice outputs the parameters required for the operation of the monitored dicing machine to the control board, and the control board controls the dicing machine to perform the cutting work; when the resistivity exceeds the preset range, the third relay is closed, the second relay and the control loop is disconnected, and the control board controls the dicing machine to stop cutting. The application may timely and effectively prevent electrostatic pollution brought to the chip during the chip cutting process, reduce the risk of chip failure, and greatly improve product yield and production efficiency.

Description

technical field [0001] The present application relates to the technical field of chip manufacturing and processing, in particular to a chip dicing system and its control circuit. Background technique [0002] In the chip scribing process, the use of high-quality ultra-pure water can help improve product yield. However, ultrapure water has high resistivity and almost no conductivity, so it is easy to generate static electricity on the surface of the product, causing electrostatic pollution to the product. [0003] In related technologies, CO 2 (Carbon dioxide) The foaming machine injects CO2 into the ultrapure water to adjust the resistance value of the pure water, so as to avoid static electricity on the product surface during the scribing process and cause electrostatic pollution to the product. Currently, in the chip scribing process, the CO 2 The water outlet of the foaming machine is connected to the water inlet of the cutting water of the scribing machine to realize ...

AI Technical Summary

Problems solved by technology

[0004] However, this solution can only play a monitoring function. Even if the alarm is issued when the resistivity exceeds the preset range, the employees cannot find and deal with it in time. The chip machine will not automatically stop cutting, and it is very likely to cause electrostatic pollution or electrical performance failure of the product at this time

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