Chip cutting system and its control circuit

Abstract

The present application provides a chip dicing system and a control circuit thereof. In the present application, the control circuit of the chip cutting system includes a first relay, a second relay, a monitoring device, and a control main board sequentially connected in series to form a control loop, and also includes a third relay electrically connected to the second relay; the first relay When the foam machine is closed, the foam machine is powered on. When the resistivity of the water output by the foam machine is within the preset range, the third relay is disconnected, the second relay is closed, the control loop is closed, and the monitoring device will monitor the scribing machine to work. The parameters are output to the control board, and the control board controls the dicing machine to perform cutting work; when the resistivity exceeds the preset range, the third relay is closed, the second relay is disconnected, the control circuit is disconnected, and the control board controls the dicing machine to stop cutting work . The application can timely and effectively prevent electrostatic pollution to chips during the chip cutting process, reduce the risk of chip failure and greatly improve product yield and production efficiency.

Description

technical field [0001] The present application relates to the technical field of chip manufacturing and processing, in particular to a chip dicing system and its control circuit. Background technique [0002] In the chip scribing process, the use of high-quality ultra-pure water can help improve product yield. However, ultrapure water has high resistivity and almost no conductivity, so it is easy to generate static electricity on the surface of the product, causing electrostatic pollution to the product. [0003] In related technologies, CO 2 (Carbon dioxide) The foaming machine injects CO2 into the ultrapure water to adjust the resistance value of the pure water, so as to avoid static electricity on the product surface during the scribing process and cause electrostatic pollution to the product. Currently, in the chip scribing process, the CO 2 The water outlet of the foaming machine is connected to the water inlet of the cutting water of the scribing machine to realize ...

AI Technical Summary

Problems solved by technology

[0004] However, this solution can only play a monitoring function. Even if the alarm is issued when the resistivity exceeds the preset range, the employees cannot find and deal with it in time. The chip machine will not automatically stop cutting, and it is very likely to cause electrostatic pollution or electrical performance failure of the product at this time

Images