Previse metal mask plate, evaporation device and evaporation manufacture procedure

Abstract

The invention provides a precise metal mask plate. The precise metal mask plate comprises a supporting frame, a metal supporting net and at least one precise metal mask strip, wherein the metal supporting net and at least one precise metal mask strip are arranged on the supporting frame, the precise metal mask strip is located above the metal supporting net, the metal supporting net is of an integrated forming structure, at least one opening region is formed in the metal supporting net, a graphic region is arranged on the precise metal mask strip, the graphical region is located above the at least one opening region and covers at least one opening region, and in the evaporation process, a evaporation material sequentially passes through the opening region and the graphic region forms a preset evaporation pattern on the to-be-evaporated substrate. The metal supporting net integrally formed in the precise metal mask plate is used in the precise metal mask plate, the precise metal mask strips can be supported and the evaporation material can be blocked from passing through the interval between adjacent precise metal mask strips; and the shape of the opening region determines the shapeof the preset evaporation pattern, so that the shape of the pre-set evaporation pattern is determined according to the shape of the opening region, and through the arrangement of the opening region,the precise metal mask plate can be used in evaporation of a special-shaped screen.

Description

technical field [0001] The invention relates to the technical field of display panels, in particular to a precision metal mask, an evaporation device and an evaporation process. Background technique [0002] In recent years, organic light-emitting diodes (Organic Light-Emitting Diode, OLED) have the advantages of self-illumination, wide viewing angle, almost infinitely high contrast, low power consumption, high response speed, etc., and have replaced liquid crystal displays in the field of small and medium-sized displays. (Liquid Crystal Display, LCD) trend, most of the small and medium-sized OLED panels at this stage rely on the evaporation process, in which the fixture used for graphic definition in the evaporation process is a metal mask, which can be divided into precision metal masks ( Fine Metal Mask, FMM) and Common Metal Mask (CMM). FMM is used for RGB pixel definition, mainly used for evaporation of R, G, B light-emitting layers and dopant materials, and CMM is mai...

AI Technical Summary

Problems solved by technology

Nowadays, special-shaped screens are mainly LCD hard screens, which need to be cut with a knife wheel during the manufacturing process, resulting in a low production yield

Flexible OLED panels can be cut by laser, without the many defects of knife wheel cutting. At the same time, the slivers of the flexible panel are peeled off by laser stripping technology, which will not cause damage to the flexible substrate. However, the existing evaporation technology is not suitable for evaporation of special-shaped screens. The main reason is that no special-shaped FMM has been developed and used

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