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A wide-range wind speed sensor and method of making the same

A wind speed sensor with a wide range of technology, applied in the direction of measuring fluid speed, instruments, and measuring devices using thermal variables, can solve the problems of small measurement range, limited popularization and application, and high cost, and achieve easy batch production, reliable technology, and temperature drift small effect

Active Publication Date: 2020-03-31
SOUTHEAST UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Traditional wind cups and wind vanes are still widely used detection devices, but these devices are large in size, not sensitive enough to low wind speed measurement, and the mechanical rotating structure is easy to wear; ultrasonic wind sensors are another commonly used wind sensor, this sensor High precision, but factors such as large volume and high cost limit its application field
Thermal wind sensors reflect wind speed information by measuring heat loss or thermal symmetry. This type of sensor is more sensitive to low wind speeds, and the structure can also be made small, but the problem of small measurement range limits its use in two-dimensional wind speed measurement. Promoted application of

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  • A wide-range wind speed sensor and method of making the same
  • A wide-range wind speed sensor and method of making the same

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Embodiment Construction

[0028] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.

[0029] Such as figure 1 with figure 2 As shown, the present invention designs a wide-range wind speed sensor. In practical application, it specifically includes a substrate 1, an elastic film 2, a heating element 5, a raised table top 6, a heat insulation layer 7, four pressure sensors 31 and four temperature sensor 41.

[0030] Wherein, the material of the substrate 1 and the material of the elastic film 2 are identical to each other, and the center position of the substrate 1 is provided with a through hole running through its upper and lower surfaces, and the shape and size of the elastic film 2 are the same as the shape and size of the through hole on the substrate 1. Correspondingly, the elastic film 2 is arranged in the through hole of the substrate 1, and the edge of the elastic film 2 abuts the inner edge of t...

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Abstract

The present invention relates to a wide-range wind speed sensor and manufacturing method therefor. The wide-range wind speed sensor comprises a substrate (1), an elastic thin film (2), a heating element (5), a raised table surface (6), a heat insulating layer (7), four pressure sensors (31), and four temperature sensors (41). On the basis of the design scheme of the present invention, the described hardware is combined to construct the wide-range wind speed sensor. Correspondingly, the present invention further relates to the manufacturing method for the wide-range wind speed sensor. Therefore, according to the whole technical solution, wind speed and wind direction data can be accurately measured under a low wind speed by using the principle of a thermal sensor; moreover, by using a piezoresistive effect, the wind speed and wind direction data can be accurately measured under a high wind speed; furthermore, by using a bulk-silicon micromachining technique, the process is reliable, batch manufacturing is easy, and the costs are low; in addition, a two-dimensional symmetrical structure is further used, and temperature drift is small.

Description

technical field [0001] The invention relates to a wind speed sensor with a wide range and a manufacturing method thereof, belonging to the technical field of wind speed measurement. Background technique [0002] Wind speed and wind direction are very important parameters that characterize the meteorological situation. The detection of wind speed and wind direction has an important impact on environmental monitoring, air conditioning and industrial and agricultural production. Therefore, it is of great practical significance to quickly and accurately measure wind speed and wind direction. Traditional wind cups and wind vanes are still widely used detection devices, but these devices are large in size, not sensitive enough to low wind speed measurement, and the mechanical rotating structure is easy to wear; ultrasonic wind sensors are another commonly used wind sensor, this sensor High precision, but factors such as large volume and high cost limit its application field. Ther...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P5/10G01P5/08G01P13/02
CPCG01P5/08G01P5/10G01P13/02
Inventor 秦明吴启强宋坤易真翔黄庆安
Owner SOUTHEAST UNIV