Grinding tool and method of fabricating the same

A technology for grinding tools and manufacturing methods, which is applied in the direction of grinding tools, manufacturing tools, abrasives, etc., and can solve the problems of falling of abrasive particles 11, damage of the surface of the grinding pad, and unstable fixing method, and achieves the characteristics of not easy to fall off, strong rigidity, and fixed The effect of high stability

A technology for grinding tools and manufacturing methods, which is applied in the direction of grinding tools, manufacturing tools, abrasives, etc., and can solve the problems of falling of abrasive particles 11, damage of the surface of the grinding pad, and unstable fixing method, and achieves the characteristics of not easy to fall off, strong rigidity, and fixed The effect of high stability

CN109015339AActive Publication Date: 2018-12-18KINIK
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  • Grinding tool and method of fabricating the same
  • Grinding tool and method of fabricating the same
  • Grinding tool and method of fabricating the same

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Experimental program
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Effect test

Embodiment Construction

[0022] image 3 A top view of the grinding tool 2 provided by an embodiment of the present invention is shown, Figure 4 A cross-sectional view of the grinding tool 2 is then shown. refer to image 3 and Figure 4 , the abrasive tool 2 includes a substrate 21 and a plurality of abrasive particles 22 fixed on the substrate 21 . The substrate 21 is an integrally formed rigid single body. The material of the substrate 21 is a material with strong rigidity and stable chemical activity, such as a stainless steel substrate, a ceramic substrate, etc. Here, the stainless steel substrate is taken as an example, so that the substrate 21 can be slowed down in the process of using the grinding tool 2. Adverse effects of factors such as chemical activity. The size of the substrate 21 is not limited, it is 4 inches in this example, and its thickness can be 2-3 mm. The opposite sides of the substrate 21 have two surfaces 211, 212 respectively, wherein, the surface 211 is the working su...

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Abstract

A grinding tool and a method of fabricating the same are disclosed. A grinding tool includes a substrate and a plurality of abrasive particles. The substrate has a first and a second surface and a plurality of holes, each of the holes extending through the substrate and respectively having a first and a second opening on the first and second surface, the second opening being larger than the firstopening. The abrasive particles are respectively disposed in the holes and attached to the substrate via a plurality of adhesive portions, each of the abrasive particles having a tip protruding outward from the first surface and a remaining part covered with one of the adhesive portions inside the corresponding hole, wherein the first openings of the holes are smaller than the abrasive particles,and the abrasive particles are respectively retained in the holes.

Description

technical field [0001] The present invention relates to a grinding tool, and in particular to a grinding tool with a plurality of through holes formed in a substrate for arranging grinding particles and a manufacturing method thereof. Background technique [0002] Abrasive tools have been widely used in various applications such as cutting, grinding, polishing and buffing of materials. In the stone processing industry or precision grinding industry, the efficiency of cutting, grinding and other processing procedures can be improved through the excellent wear resistance of hard abrasive particles, and the cost of such processing industries can be reduced. [0003] Chemical Mechanical Polishing (CMP) is the most common grinding process in various industries. CMP is used to make surfaces that can grind a variety of items, including ceramic, silicon, glass, quartz, or metal chips. In addition, with the rapid development of integrated circuits, CMP is one of the common wafer pl...

Claims

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Application Information

Patent Timeline
18 Dec 2018
Publication
CN109015339A
IPC
B24B37/11; B24D7/06
CPC
B24B37/11; B24D7/06; B24D3/06; B24D3/14; B24D18/0072; B24D2203/00; B24B53/017
Inventors
周瑞麟; 廖懿造