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A kind of preparation method of nanoporous silicon single concave lens

A nanoporous and concave lens technology, which is applied in the field of semiconductor technology and optical engineering, can solve the problems of difficult to realize micro-optical-mechanical-electrical system integration, poor controllability, complex process, etc.

Active Publication Date: 2020-06-02
HUNAN UNIV OF ARTS & SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this method is complicated in process, not strong in controllability, and difficult to realize micro-optical-mechanical-electrical system integration

Method used

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  • A kind of preparation method of nanoporous silicon single concave lens

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Comparison scheme
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Embodiment 1

[0018] The preparation method of the nanoporous silicon single concave lens of the present invention specifically comprises the following steps:

[0019] 1. Select the type of silicon wafer as P 100 , a single-sided polished silicon wafer 2 with a resistivity of 0.01Ω.cm and a thickness of 500 μm, a thin platinum wafer (200 μm in thickness) ball (2 cm in radius) crown 3 bottom surface length = diameter of silicon wafer as cathode, circular flat plate The thin platinum sheet 4 (thickness is 200 μm) is used as the anode; ensure that the central axis of the silicon wafer 2, the flat thin platinum sheet 4, and the center axis of the spherical crown-shaped thin platinum sheet 3 coincide with the center axis of the spherical crown-shaped thin platinum sheet 3, and the silicon wafer 2. The flat thin platinum sheet 4 and the spherical crown-shaped thin platinum sheet 3 are all immersed in the electrolytic etching solution for electrochemical corrosion. The polished surface of the sili...

Embodiment 2

[0031] The preparation method of the nanoporous silicon single concave lens of the present invention specifically comprises the following steps:

[0032] 1. Select the type of silicon wafer as P 100 , a single-sided polished silicon wafer 2 with a resistivity of 0.01Ω.cm and a thickness of 500 μm, a thin platinum wafer (200 μm in thickness) ball (2 cm in radius) crown 3 length of the bottom surface = diameter of the silicon wafer as the cathode, and a circular flat plate The thin platinum sheet 4 (thickness is 200 μm) is used as the anode; ensure that the central axis of the silicon wafer 2, the flat thin platinum sheet 4, and the center axis of the spherical crown-shaped thin platinum sheet 3 coincide with the center axis of the spherical crown-shaped thin platinum sheet 3, and the silicon wafer 2. The flat thin platinum sheet 4 and the spherical crown-shaped thin platinum sheet 3 are all immersed in the electrolytic etching solution for electrochemical corrosion. The polishe...

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Abstract

The invention discloses a preparation method of a nanometer porous silicon concave lens. The method comprises the steps of making a thin platinum sheet conventionally used as an electrode to be a hollow sphere, using a spherical crown cut from the hollow sphere as a cathode, enabling the convex surface of the spherical crown-shaped thin platinum sheet to directly face a silicone slice, using a circular flat plate thin platinum sheet as an anode, placing the silicon slice between the spherical crown-shaped thin platinum sheet and the flat plate thin platinum sheet, and dividing corrosive liquidinto two independent parts through the silicon slice; firstly adopting a constant current source for electropolishing the silicone slice, enabling one surface, close to a spherical crown-shaped thinplatinum sheet electrode, of the silicone slide to form a concave-shaped spherical surface, and enabling one surface, close to a flat plate thin platinum sheet electrode, of the silicone slide to stayin a plane; and changing the spherical crown-shaped thin platinum sheet electrode into the circular flat plate thin platinum sheet electrode, and electrochemically corroding the silicone slice so asto form the nanometer porous silicon concave lens. Through the method provided by the invention, the nanometer porous silicon concave lens can be obtained and can be widely applied to an optical micro-electromechanical system so as to make a great contribution on the field of optical micro-electromechanical systems.

Description

technical field [0001] The invention relates to the fields of semiconductor technology and optical engineering, in particular to a method for preparing a nanoporous silicon single concave lens. Background technique [0002] In 1956, Uhlir discovered the existence of porous silicon when electrochemically polishing silicon wafers in HF solution; in 1990, Canham discovered that porous silicon emits visible light at room temperature. This discovery opened up a new era for the research of porous silicon, namely Luminescence of porous silicon at room temperature is in the research stage; the luminescence of porous silicon at room temperature shows the broad application prospects of silicon in optoelectronics, optical devices and display technology. Especially in 1996, Hirschman's first realization of silicon-based optoelectronic integrated prototype device was a milestone in the application research of porous silicon. [0003] The porous silicon membrane is a sponge-like porous m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C25F3/30G02B3/00
CPCC25F3/30G02B3/00
Inventor 龙永福
Owner HUNAN UNIV OF ARTS & SCI