Vacuum equipment suction capacity determination method
A method for determining the suction capacity and a technology for determining the suction capacity. It is applied in the field of determining the suction capacity of vacuum equipment. It can solve problems such as limiting the performance of the equipment or evaluating the suction capacity, and achieve the effect of reducing difficulty and cost.
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[0057] The present invention is described in further detail below in conjunction with accompanying drawing:
[0058] see figure 1 , the present invention uses the vacuum equipment to pump the vacuum system, and evaluates the suction capacity of the vacuum equipment by calculating the volume flow rate sucked by the vacuum equipment through the change of the vacuum system pressure p with time t. In order to achieve the above object, the present invention adopts the following technical solutions to achieve:
[0059] Create a relatively independent closed system 2, the closed system is connected with the vacuum equipment 1 through the isolation valve 3, and the pressure measuring point 4 and the temperature measuring point 5 are installed on the system.
[0060] Put in the vacuum equipment 1, fully open the isolation valve 3, and convert the volume flow rate of the vacuum equipment through the pressure change of the closed system 2, and the volume flow rate of the vacuum equipmen...
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