A kind of thin film transistor and its preparation method, sensor

Abstract

The present application provides a thin film transistor, its preparation method, and a sensor, wherein the thin film transistor includes a substrate, a gate, a gate insulating layer, a source, a drain, and an active layer disposed on the substrate; wherein, A microchannel is arranged in the active layer, and the thin film transistor is used for detecting samples in the microchannel. The technical scheme of the present application sets microchannels in the active layer of the thin film transistor TFT. When the sample to be tested enters the microchannel, it will affect the distribution of electrons in the active layer and cause fluctuations in TFT characteristics. By detecting the fluctuations in TFT characteristics , can achieve the technical effect of detecting the composition and properties of the liquid to be tested. Moreover, with the help of microchannels, the samples in it can be precisely controlled, on the one hand, the influence of the external environment can be reduced, and the detection accuracy can be improved; on the other hand, continuous monitoring of samples can be realized instead of one-time detection, which improves the efficiency of sample detection.

Description

technical field [0001] The invention relates to the technical field of detection, in particular to a thin film transistor, a preparation method thereof, and a sensor. Background technique [0002] In recent years, sensors based on thin film transistor TFT devices have been gradually developed. When the samples to be tested, such as biological, chemical, and medical samples, come into contact with TFT, the characteristics of TFT will fluctuate. By detecting and analyzing the fluctuation of TFT characteristics, the detection of biological, chemical, medical and other sample reagents can be achieved, such as protein detection, DNA detection and so on. [0003] However, in the prior art, the sample to be tested is usually dropped onto the surface sensing area of ​​the TFT. Due to the influence of the external environment such as air and humidity during the detection process, the measurement results are not accurate enough, and such a measurement method It can only be detected ...

AI Technical Summary

Problems solved by technology

[0003] However, in the prior art, the sample to be tested is usually dropped onto the surface sensing area of ​​the TFT. Due to the influence of the external environment such as air and humidity during the detection process, the measurement result is not accurate enough, and this measurement method It can only be detected instantaneously and cannot be continuously monitored, resulting in low sample detection efficiency

Images