A DMD multi-region laser projection system and exposure method

A technology of laser projection and exposure method, which is applied in the direction of microlithography exposure equipment, photolithography exposure device, optics, etc., can solve the problems of expensive DMD, long exposure time, and increased DMD cost, so as to expand the imaging area and improve Exposure to the overall time, the effect of saving material costs

Active Publication Date: 2019-01-01
SUZHOU YUANZHUO OPTOELECTRONICS TECH CO LTD
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Problems solved by technology

However, due to the small size of the DMD and the large size of the mask, the complete exposure of a mask is scanned many times, and the exposure time is long. At the same time, factors such as the sensitivity of the mask material need to be considered during the scanning exposure process. Will be fully used, and DMD is expensive, DMD utilization is

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  • A DMD multi-region laser projection system and exposure method
  • A DMD multi-region laser projection system and exposure method
  • A DMD multi-region laser projection system and exposure method

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[0020] In order to make the object, technical solution and advantages of the present invention clearer, the present invention is described below through specific embodiments shown in the accompanying drawings. It should be understood, however, that these descriptions are exemplary only and are not intended to limit the scope of the present invention. Also, in the following description, descriptions of well-known structures and techniques are omitted to avoid unnecessarily obscuring the concept of the present invention.

[0021] Such as Figure 1-4 Shown, a kind of DMD multi-area laser projection system and exposure method of the present invention include DMD control system 1, optical system 2, mask plate 3, sub-map system 4 and motion control system 5, DMD control system 1 is responsible for data The processing CPU control unit and DMD control circuit are composed. The CPU control unit obtains the image data of the DMD control system 1, and after data conversion, sends the im...

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Abstract

A DMD multi-region laser projection system and exposure method are disclosed, the system includes a DMD control system, an optical system, a mask, a graph division system and a motion control system,a plurality of exposure patterns are displayed on a single DMD, combined with the optical system, the plurality of exposure patterns are mapped to different exposure areas of the mask for exposure, and the whole system can use a single DMD or a plurality of DMDs for simultaneous exposure, and exposure according to the method of the invention can rapidly increase the overall exposure time and savethe material cost of the DMD at the same time.

Description

Technical field: [0001] The invention belongs to the technical field of laser direct imaging, in particular to a DMD multi-region laser projection system and an exposure method. Background technique: [0002] Laser direct imaging technology is to directly image the image on the mask plate by laser scanning method, which is used in the exposure process of pcb process and screen printing. After exposure, the image stays on the mask plate, combined with the subsequent process, to complete pcb or silk screen making. The core imaging part of this technology is composed of sub-image system, DMD (Digital Micromirror Device) control system, optical projection system and motion platform control system. [0003] At present, the first step of this technology in China is to divide the original large image to be exposed into M small graphics through the sub-image system, and then hand over the sub-image data to the DMD control system to display the small image on the DMD micromirror arr...

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Application Information

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IPC IPC(8): G03F7/20
CPCG02B26/0833G03F7/70116G03F7/70358G03F7/70475
Inventor 刘金武张书荣胥涛鹏张雷
Owner SUZHOU YUANZHUO OPTOELECTRONICS TECH CO LTD
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