A DMD multi-region laser projection system and exposure method

Abstract

A DMD multi-region laser projection system and exposure method are disclosed, the system includes a DMD control system, an optical system, a mask, a graph division system and a motion control system,a plurality of exposure patterns are displayed on a single DMD, combined with the optical system, the plurality of exposure patterns are mapped to different exposure areas of the mask for exposure, and the whole system can use a single DMD or a plurality of DMDs for simultaneous exposure, and exposure according to the method of the invention can rapidly increase the overall exposure time and savethe material cost of the DMD at the same time.

Description

Technical field: [0001] The invention belongs to the technical field of laser direct imaging, in particular to a DMD multi-region laser projection system and an exposure method. Background technique: [0002] Laser direct imaging technology is to directly image the image on the mask plate by laser scanning method, which is used in the exposure process of pcb process and screen printing. After exposure, the image stays on the mask plate, combined with the subsequent process, to complete pcb or silk screen making. The core imaging part of this technology is composed of sub-image system, DMD (Digital Micromirror Device) control system, optical projection system and motion platform control system. [0003] At present, the first step of this technology in China is to divide the original large image to be exposed into M small graphics through the sub-image system, and then hand over the sub-image data to the DMD control system to display the small image on the DMD micromirror arr...

AI Technical Summary

Problems solved by technology

However, due to the small size of the DMD and the large size of the mask, the complete exposure of a mask is scanned many times, and the exposure time is long. At the same time, factors such as the sensitivity of the mask material need to be considered during the scanning exposure process. Will be fully used, and DMD is expensive, DMD utilization is low

At present, most domestic companies use multiple DMDs to expose at the same time. In this way, when exposing a mask, the number of operations of the platform control system will be reduced exponentially, but the cost of DMD will increase. How to quickly and economically expose has become a major issue in the field of laser direct imaging. problem

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