Efficient and accurate calibration method for laser interferometer optical path based on PSD

Abstract

The invention discloses an efficient and accurate calibration method for a laser interferometer optical path based on a PSD. Firstly the system optical path is established, then the laser interferometer optical path is roughly adjusted, and finally the coordinate values of each calibration point is obtained according to the PSD two-dimensional photosensitive position sensor and the offset of the measurement light relative to the reference reflected light is calculated and the laser interferometer optical path is precisely adjusted according to the offset. Automatic calibration of the laser interferometer optical path is realized through the coordinates measured in the PSD two-dimensional photosensitive position sensor, and the offset of the calibration beams is obtained by using the PSD two-dimensional photosensitive position sensor so as to indirectly obtain the offset of the measurement light, realize automatic adjustment of the optical path, realize the high-precision optical path calibration, improve the calibration efficiency and accuracy and have good practicability.

Description

technical field [0001] The invention belongs to the field of optical technology, and in particular relates to a high-efficiency and precise calibrating method for an optical path of a laser interferometer based on PSD. Background technique [0002] Multi-axis CNC machine tools are widely used in the processing of parts and components in the fields of aerospace and automobile manufacturing, and often require high geometric accuracy. The geometric accuracy is mainly divided into two aspects: (1) Multi-axis CNC machine tools (2) During the use of the multi-axis CNC machine tool, its geometric accuracy will decrease, and the geometric accuracy of the current machine tool. [0003] In order to stabilize the geometric accuracy of the machine tool at a high level, it is necessary to regularly detect the geometric accuracy of the machine tool and compensate for the resulting geometric errors. The geometric error of the machine tool can be effectively obtained by using the geometric...

AI Technical Summary

Problems solved by technology

[0005] At present, the problems of this measurement method are mainly manifested in: (1) The direction of the space measurement line segment established according to the machine tool geometric error identification method is diverse. For example, the measurement line segment of a single translation axis is along the X, Y, and Z directions of the machine tool coordinate system. , and the XZ, XY, XYZ multi-axis linkage measurement line segment forms a certain inclination angle with each coordinate axis, and according to the measurement principle of the laser interferometer, it must be ensured that the measurement light returned by the moving corner mirror is consistent with the reference corner mirror. The reference reflected light interferes at the receiving head of the laser interferometer, which requires adjusting the position of the laser interferometer to calibrate the optical path to ensure that the measurement light can return to the receiving head; (2) The current way to calibrate the optical path is only for engineers to use a tripod for laser interference The fine-tuning of the instrument position relies too much on engineering experience, and the adjustment process has low efficiency and low accuracy

Images