Method for detecting complex permittivity of nano film by virtue of multifunctional rectangular cavity perturbation method

Abstract

A method for detecting complex permittivity of a nano film by virtue of a multifunctional rectangular cavity perturbation method relates to the field of detection of material performance parameters. The nano film chip-type material measuring device contains a rectangular cavity sensor, a microwave vector network analyzer, an input coaxial cable, an output coaxial cable, a GPIB data acquisition card and a computer. The method provided by the invention can detect complex permittivity (permittivity and a dielectric loss coefficient) of a pure dielectric material, complex permeability (permeability and a magnetic loss coefficient) of a pure magnetic material and complex permittivity (permittivity, a dielectric loss coefficient, permeability and a magnetic loss coefficient) of a mixed dielectric material, has multiple functions and multiple modes and is high in accuracy and easy in experimental operation.

Description

technical field [0001] The invention relates to the field of detecting material performance parameters, in particular to a method for detecting the complex dielectric constant of a nanometer film by a multifunctional rectangular cavity perturbation method. Background technique [0002] With the rapid development of modern science and technology, the demand and research of devices composed of nano-film sheet materials have been greatly improved. The chip integration of microwave devices has become the development trend of radio frequency and microwave devices. The same nano-film material sheet materials It has also been widely used in various fields of the electronics industry. For microwave thin-film sheet materials, the complex dielectric constant (ε′, ε″, μ′, μ″) is an important parameter to characterize the material properties, and is one of the important factors that determine the applicability of nano-film sheet materials. Therefore, it has become more important to acc...

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Problems solved by technology

[0003] Due to the thin thickness and small size of the nano-film sheet material, the accuracy of the experiment is greatly reduced, and it also brings great difficulties in measurement.

At present, the performance of nano-film materials and sheet materials at home and abroad are relatively low-frequency testing instruments and sensors.

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