Micro-gripper for measuring clamping force and jaw displacement by optical fiber Fabry-Perot interferometer

Abstract

The invention relates to a micro-gripper for measuring the clamping force and the jaw displacement by an optical fiber Fabry-Perot interferometer to solve the problem that the micro-gripper in the prior art cannot measure the clamping force and the jaw displacement accurately at the same time. The technical scheme is that the micro-gripper comprises a base, a monolithic flexible mechanism fixed onthe base, an actuator installed in a cavity provided on the monolithic flexible mechanism, a controller, an F-P demodulator connected with the controller, and an optical fiber Fabry-Perot multiplexedsensor connected with the F-P demodulator. The monolithic flexible mechanism comprises: a displacement amplifier mechanism, two clamping force sensing mechanisms symmetrically arranged and two clamping jaws symmetrically arranged, the input stage of the displacement amplifying mechanism is in contact with the actuator, the two output stages of the displacement amplifying mechanism, the two clamping force sensing mechanisms and the two clamping jaws correspond one by one, and the output stage of the displacement amplifying mechanism, the clamping force sensing mechanism and the clamping jaws are sequentially connected.

Description

Technical field [0001] The invention relates to the field of micro-manipulation and micro-assembly, in particular to a micro-clamp that uses an optical fiber Fabry-Perot interferometer to measure clamping force and clamping jaw displacement. Background technique [0002] With the rapid development of Micro-Electro-Mechanical System (MEMS), coupled with the traditional MEMS manufacturing process that cannot produce small parts with complex three-dimensional geometric structures and composed of different materials, micro-assembly and micro-manipulation technologies have emerged A pivotal role. Micro clamps are the end effectors of micro assembly systems and micro operating systems. They are in direct contact with the objects to be operated. They play a decisive role in the completion of micro assembly and micro manipulation tasks. They are widely used in biomedicine, electronics manufacturing, and aerospace. And military and other fields. [0003] Commonly used micro clamp drive me...

AI Technical Summary

Problems solved by technology

[0007] The object of the present invention is to provide a kind of micro gripper that utilizes optical fiber Fabry-Perot interferometer to measure clamping force and gripper displacement, to solve the problem that micro grippers in the prior art cannot accurately measure gripping force and gripper displacement at the same time measurement problem

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