Miscellaneous gas cleaning-isolating device for flexible coiling-coating equipment
A technology of coating equipment and isolating devices, which is applied in the field of cleaning and isolating devices with miscellaneous gases for flexible winding coating equipment, can solve the problems of process gas entering, unfavorable promotion and popularization, and affecting the stability of winding coating equipment products, so as to reduce environmental pollution. Pollution, efficiency improvement effect
Pending Publication Date: 2019-01-22
ANHUI FANGXING PHOTOELECTRIC NEW MATERIALS TECH
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Problems solved by technology
[0002] At present, the flexible transparent conductive film deposition technology has been widely promoted in the touch screen industry. The flexible transparent conductive film is plated by the roll-to-roll coating equipment, but the sputtering chamber in the flexible roll-to-roll coating equipment is in the process of sputtering the flexible transparent conductive film substrate. Sometimes there will be redundant process gas entering adjacent chambers, which will cause different process gases to mix and affect the quality of flexible transparent conductive film plating. The vacuum degree affects the product stability of the winding coating equipment, which is not conducive to the wide promotion and popularization
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[0017] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0018] The present invention provides such Figure 1-4 The shown is a flexible winding coating equipment with miscellaneous gas cleaning isolation device, including the winding coating equipment body 1, the inside of the winding coating equipment body 1 is located at the same angle on the surface of the coating drum and is equipped with six sets of magnetron sputtering The chamber 2, and the inside of the winding coating equipment body 1 is located between eve...
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The invention discloses miscellaneous gas cleaning-isolating device for flexible coiling-coating equipment. The miscellaneous gas cleaning-isolating device comprises a coiling-coating equipment body,wherein six groups of magnetron sputtering chambers are arranged on the surface of a coating drum inside the coiling-plating equipment body at equal angles; vacuum chambers are arranged between everytwo groups of magnetron sputtering chambers inside the coiling-plating equipment body; overflow ports are formed between the vacuum chambers and the magnetron sputtering chambers; check valves are arranged in the overflow ports; vacuum pumps are arranged on the outer sides of the vacuum chambers; the air inlet ends of the vacuum pumps are fixedly connected with air pumping holes of the vacuum chambers; the air outlet ends of the vacuum pumps are fixedly connected with gas purifying devices through pipelines. The miscellaneous gas cleaning-isolating device has a simple and reasonable structuraldesign, and is convenient to operate. Miscellaneous gas is effectively prevented from overflowing to other chambers, the vacuum degree of the coiling-coating equipment is ensured during use, and meanwhile the miscellaneous gas can be treated conveniently. The miscellaneous gas cleaning-isolating device is safe and stable, has a wide application range and is beneficial to popularization.
Description
technical field [0001] The invention belongs to the technical field of miscellaneous gas cleaning, and in particular relates to a miscellaneous gas cleaning and isolating device for flexible winding coating equipment. Background technique [0002] At present, the flexible transparent conductive film deposition technology has been widely promoted in the touch screen industry. The flexible transparent conductive film is plated by the roll-to-roll coating equipment, but the sputtering chamber in the flexible roll-to-roll coating equipment is in the process of sputtering the flexible transparent conductive film substrate. Sometimes there will be redundant process gas entering adjacent chambers, which will cause different process gases to mix and affect the quality of flexible transparent conductive film plating. The vacuum degree affects the product stability of the winding coating equipment, which is not conducive to extensive promotion and popularization. Contents of the inv...
Claims
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IPC IPC(8): C23C14/56C23C14/35
CPCC23C14/35C23C14/562C23C14/564
Inventor 任丹张红关仁鹤杨志彬
Owner ANHUI FANGXING PHOTOELECTRIC NEW MATERIALS TECH