Piezoelectric vibration sensor
A vibration sensor and sensor technology, applied in the sensor field, can solve the problems of low space utilization, low efficiency, low degree of automation, etc., and achieve the effects of reducing space occupancy, expanding the scope of use, and improving production efficiency
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Embodiment 1
[0022] See Figure 1 ~ Figure 3 , a piezoelectric vibration sensor, comprising an upper cover structure, a positioning plate 1, a lower cover structure, a piezoelectric element 2 and a circuit mechanism 3, the positioning plate 1 includes a positioning plate body 11 and is arranged on the positioning The positioning through hole 12 on the plate body 11, the upper cover plate structure includes the upper cover plate body and the first chamber surrounded by the upper cover plate body, and the lower cover plate structure includes the lower cover plate The plate body and the second chamber surrounded by the lower cover plate body, the upper cover plate structure, the positioning plate 1 and the lower cover plate structure are arranged in sequence, the first chamber, the positioning through hole 12 and the second The two chambers are connected to form a cavity, and the positioning plate body 11 is also provided with a channel 13 , one end of the channel 13 communicates with the cav...
Embodiment 2
[0028]The difference between the second embodiment and the first embodiment is that the sensor further includes one or two mass blocks 8 , and the mass blocks 8 are arranged at the movable end of the piezoelectric element 2 . When the sensor is provided with a mass block 8, the mass block 8 can be arranged on the upper surface or the lower surface of the movable end of the piezoelectric element 2, such as Figure 5 As shown, the mass 8 is arranged on the upper surface of the movable end of the piezoelectric element 2 . When the sensor is provided with two masses 8 , one mass 8 is arranged on the upper surface of the piezoelectric element 2 , and the other mass 8 is arranged on the lower surface of the piezoelectric element 2 . Setting the mass block 8 can improve the sensitivity of the sensor.
[0029] The above-mentioned sensors are all plate-shaped stacked structures. When producing the first plate body 41, the second plate body 42, the third plate body 51, the fourth plate...
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