PVD (physical vapor deposition) coating feeding and discharging system

Abstract

The invention discloses a PVD (physical vapor deposition) coating feeding and discharging system, and relates to the technical field of automatic design. The PVD (physical vapor deposition) coating feeding and discharging system comprises a workbench and material tray parts, wherein the material tray parts are used for containing finished products or raw materials; each material tray part comprises a jig plate and a cover plate which cover each other; the multiple material tray parts are arranged on a circulating assembly and are driven by the circulating assembly to move among a plurality ofpreset positions; the movement tracks of the multiple material tray parts are closed; a dust removal assembly can grab the cover plates on the circulating assembly so as to perform dust removal and cover the cover plates subjected to dust removal on the jig plates; a discharging mechanical arm can grab the finished products from the circulating assembly and stack the finished products in a lower storage part; a feeding mechanical arm can grab the raw materials from an upper storage part and stack the raw materials on positioning platforms; and positioning mechanical arms can grab the raw materials and stack the raw materials on the jig plates on the circulating assembly. The PVD (physical vapor deposition) coating feeding and discharging system has the advantages of being reasonable in structural design, high in feeding and discharging speed and high in production efficiency.

Description

technical field [0001] The invention relates to the technical field of automatic design, in particular to a PVD coating loading and unloading system. Background technique [0002] The PVD coating loading and unloading system is an automatic system for PVD coating equipment. The main function is to take out the processed finished product from the PVD coating equipment together with the cover plate and the fixture plate. The next step is to remove the cover plate and the fixture plate. Separation and sent to cleaning and dust removal, the finished product is taken out from the jig board and put into the empty Tray tray to be transported to the next process position; the empty jig board flows into the next station to replenish raw materials, and the cleaned and dust-removed cover plate is covered Then input PVD coating equipment again to carry out the cycle processing process. The requirements for the PVD coating loading and unloading system mainly include: ensuring that the t...

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Problems solved by technology

[0003] In the prior art, the structure of the PVD coating loading and unloading system is relatively complicated, and the position setting between each station is relatively scattered. It is also necessary to separately set up a transmission mechanism between the two stations to realize the connection between the stations, resulting in the entire system The volume is huge and occupies a large space; at the same time, the rationality of the structural design is not high, the number of finished products or raw materials that can be taken and placed at one time is not large, and the speed of loading and unloading is slow

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