PVD (physical vapor deposition) coating feeding and discharging system

A technology of raw materials and trays, applied in the field of PVD coating loading and unloading systems, can solve the problems of large space, slow speed, complex structure, etc., and achieve the effects of reasonable structure design, fast loading and unloading speed, and high production efficiency.

CN109319492APending Publication Date: 2019-02-12GUANGDONG TOPSTAR TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2019-02-12

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Abstract

The invention discloses a PVD (physical vapor deposition) coating feeding and discharging system, and relates to the technical field of automatic design. The PVD (physical vapor deposition) coating feeding and discharging system comprises a workbench and material tray parts, wherein the material tray parts are used for containing finished products or raw materials; each material tray part comprises a jig plate and a cover plate which cover each other; the multiple material tray parts are arranged on a circulating assembly and are driven by the circulating assembly to move among a plurality ofpreset positions; the movement tracks of the multiple material tray parts are closed; a dust removal assembly can grab the cover plates on the circulating assembly so as to perform dust removal and cover the cover plates subjected to dust removal on the jig plates; a discharging mechanical arm can grab the finished products from the circulating assembly and stack the finished products in a lower storage part; a feeding mechanical arm can grab the raw materials from an upper storage part and stack the raw materials on positioning platforms; and positioning mechanical arms can grab the raw materials and stack the raw materials on the jig plates on the circulating assembly. The PVD (physical vapor deposition) coating feeding and discharging system has the advantages of being reasonable in structural design, high in feeding and discharging speed and high in production efficiency.
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Description

technical field

[0001] The invention relates to the technical field of automatic design, in particular to a PVD coating loading and unloading system. Background technique

[0002] The PVD coating loading and unloading system is an automatic system for PVD coating equipment. The main function is to take out the processed finished product from the PVD coating equipment together with the cover plate and the fixture plate. The next step is to remove the cover plate and the fixture plate. Separation and sent to cleaning and dust removal, the finished product is taken out from the jig board and put into the empty Tray tray to be transported to the next process position; the empty jig board flows into the next station to replenish raw materials, and the cleaned and dust-removed cover plate is covered Then input PVD coating equipment again to carry out the cycle processing process. The requirements for the PVD coating loading and unloading system mainly include: ensuring that the t...

Examples

Embodiment Construction

[0061] In order to make the technical problems solved by the present invention, the technical solutions adopted and the technical effects achieved clearer, the technical solutions of the embodiments of the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only the technical solutions of the present invention. Some, but not all, embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without making creative efforts belong to the protection scope of the present invention.

[0062] In the description of the present invention, unless otherwise clearly specified and limited, the terms "connected", "connected" and "fixed" should be understood in a broad sense, for example, it can be a fixed connection, a detachable connection, or an integrated ; It can be a mechanical connection or an electrical connection; it can be a d...