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Piezoelectric microphone with deflection control and method of making the same

A technology of diaphragm and hard mask, applied in piezoelectric microphone with deflection control and its manufacturing field

Active Publication Date: 2019-02-12
VANGUARD INT SEMICON SINGAPORE PTE LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Furthermore, latent stickiness often exists during operation

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  • Piezoelectric microphone with deflection control and method of making the same
  • Piezoelectric microphone with deflection control and method of making the same
  • Piezoelectric microphone with deflection control and method of making the same

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Embodiment Construction

[0027] In the following description, for purposes of explanation, numerous specific details are set forth to provide a thorough understanding of exemplary embodiments. It is evident, however, that the exemplary embodiments may be practiced without these specific details or with an equivalent arrangement. In other instances, well-known structures and devices are shown in block diagrams in order to avoid unnecessarily obscuring illustrative embodiments. Furthermore, unless otherwise stated, all numbers expressing quantities, ratios and numerical properties of ingredients, reaction conditions, etc. in the present specification and claims are to be understood as being modified by the word "about" in all instances.

[0028] The present disclosure addresses and solves the current problem of limited control of piezoelectric microphones due to deflection mismatch of the relaxation device at the gap of the bridge and the diaphragm. The present disclosure also addresses and solves the ...

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Abstract

The invention relates to a piezoelectric microphone with deflection control and method of making the same. A method of forming a piezoelectric microphone with an interlock / stopper and a micro-bump anda resulting device are provided. Embodiments include forming a membrane over a Si substrate having a first and second sacrificial layer disposed on opposite surfaces thereof, the membrane being formed on the first sacrificial layer, forming a first HM over the membrane, forming first and second vias through the first HM, forming a first pad layer in the first and second vias and over an exposed top thin film, forming a trench to the first sacrificial layer between the first and second vias and a gap between the trench and second via, patterning a second HM over the membrane, in the first andsecond vias, the trench and the gap, and forming a second pad layer over the second HM and in exposed areas around the first and second vias to form pad structures.

Description

technical field [0001] The present disclosure pertains to semiconductor fabrication and to the resulting devices. In particular, the present disclosure relates to a piezoelectric microphone with deflection control and prevention of stiction. Background technique [0002] A piezoelectric microphone is a device that senses audio frequency vibrations through physical contact and is insensitive to air. Piezoelectric microphones can be used as leak probes and for gas acoustic testing, and have many other uses not limited to air. [0003] Please refer to figure 1 , the existing piezoelectric microphone is formed by the following: a diaphragm 101 with a seal ring cap structure 103 of solid aluminum copper (AlCu), a groove 105 passing through the middle of the diaphragm 101, a solder pad 107, and a The membrane 101 on the first side of the groove 105 protrudes and the bridge 109 is suspended above the membrane 101 on the second side of the trench 105 . The seal ring cap structur...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B3/00B81C1/00
CPCB81B3/0027B81C1/00349B81C1/0038B81B3/001H04R17/02B81B2201/0257H04R31/00H04R2201/003H10N30/302H10N30/06H10N30/082H10N30/308H10N30/877H10N30/883H10N30/1051
Inventor 夏佳杰拉克什·库玛M·P·奈尔N·兰加纳坦
Owner VANGUARD INT SEMICON SINGAPORE PTE LTD