Unlock instant, AI-driven research and patent intelligence for your innovation.

Laser direct writing device based on super lens and laser direct writing method thereof

A technology of laser direct writing and superlens, applied in the field of laser direct writing, can solve the problem that the lens diffraction limit direct writing accuracy needs to be improved, and achieve the effect of breaking through the optical diffraction limit, reducing interference, and realizing large size.

Inactive Publication Date: 2019-02-15
JINAN UNIVERSITY
View PDF15 Cites 6 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the diffraction limit and direct writing accuracy of traditional lenses still need to be improved

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Laser direct writing device based on super lens and laser direct writing method thereof
  • Laser direct writing device based on super lens and laser direct writing method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0027] The present invention will be further described below in conjunction with the embodiments and accompanying drawings, but the protection scope of the present invention should not be limited thereby.

[0028] The schematic diagram of the laser direct writing device of the present invention is as figure 1 As shown, it can be seen from the figure that the laser direct writing device of the present invention includes a mobile platform 18, a Damman grating laser direct writing optical path, a self-focusing optical path, and a control system.

[0029] A horizontal adjustment platform 17 is arranged on the mobile platform 18, and the grating substrate to be written is placed on the horizontal adjustment platform 17.

[0030] The Damman grating laser direct writing optical path above combines the Damman grating with the metalens, and uses the beam splitting characteristics of the Damman grating to realize parallel direct writing. Using the super-resolution imaging of the metal l...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a laser direct writing device based on a super lens and a laser direct writing method thereof. A super lens is placed on a direct writing substrate, and the super-resolution imaging of the super lens is fully utilized to form a high-resolution image at a distance from the lower surface of the super lens and the near field range thereof. The size of the focusing spot is reduced, so that the writing density is increased, and a high-density grating can be written. By using a Dammann grating, multiple grating lines can be written directly at one time, and the parallelism of laser direct writing can be improved. The device is suitable for writing large-scale diffractive optical elements with high density and high precision.

Description

technical field [0001] The invention relates to laser direct writing technology, in particular to a hyperlens-based laser direct writing device and a laser direct writing method thereof. Background technique [0002] Large-size diffraction gratings have more and more applications in high-power laser and chirped pulse compression technology, and are the core key optical devices in optical systems and scientific instruments such as large astronomical telescopes and inertial confinement fusion laser ignition systems. The preparation of diffractive optical components with large size, high precision, and high-power laser applications has become an urgent problem to be solved. Microelectronics processing technology has made great progress in the field of fabrication of diffractive optical elements. As a new type of technology in microelectronic processing technology, laser direct writing technology has received more and more attention, and the development of laser direct writing ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): G02B5/18G03F7/20G02B5/00
CPCG02B5/008G02B5/1857G03F7/2053G03F7/704
Inventor 王津周常河贾伟谢永芳赵冬项长铖
Owner JINAN UNIVERSITY