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Wire gating module, polarizing lighting device and optical alignment device

A lighting device, wire grid polarization technology, applied in the direction of nonlinear optics, optics, optical components, etc., can solve the problems of poor extinction ratio and uneven illumination, achieve good extinction ratio and uniformity of illumination, and prevent leakage

Inactive Publication Date: 2019-02-26
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide a wire grid assembly, a polarizing lighting device and a light alignment device to solve the problems of poor extinction ratio and uneven illumination in the prior art when the light emitted by a linear light source passes through the wire grid assembly.

Method used

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  • Wire gating module, polarizing lighting device and optical alignment device
  • Wire gating module, polarizing lighting device and optical alignment device
  • Wire gating module, polarizing lighting device and optical alignment device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] refer to figure 1 , which is a schematic diagram of the wire grid assembly provided in this embodiment. The wire grid assembly provided in this embodiment is used to polarize light from a linear light source. The wire grid assembly includes a plurality of wire grid polarizing elements 1, each The wire grid polarizing element 1 includes a base 12 and a wire grid 11; the wire grid 11 is located on the surface of the base 12; a plurality of the wire grid polarizing elements 1 complement each other along the length direction of the linear light source. The form is spliced ​​side by side, and a splicing gap 2 is formed at the splicing place; the wire grids 11 of two adjacent wire grid polarizing elements 1 have overlapping parts at the splicing place, and the overlapping parts can be incident on the linear light source Light in the splicing slit is polarized.

[0038] read on figure 1 In this embodiment, each of the wire grid polarizing elements 1 is a double-sided wire gr...

Embodiment 2

[0045] see next figure 2 , which is a schematic diagram of the wire grid assembly provided in this embodiment. In the previous embodiment, a step was processed on the splicing surface of the wire grid polarizing element 1 and overlapped with each other, but in fact, the splicing surface can also be Surface processing into other shapes, such as figure 2 As shown in the wire grid assembly, the splicing surface is processed into a zigzag shape ( figure 2only schematically shows the case of one tooth, but the present invention is not limited to one tooth), for example, two wire grid polarizing elements 1 spliced ​​together, wherein the splicing surface of one wire grid polarizing element 1 is processed into inwardly concave sawtooth , the splicing surface of the other wire grid polarizing element 1 to be spliced ​​with is processed into outwardly convex sawtooth, and the size of the concave sawtooth matches the size of the outwardly convex sawtooth, so as to facilitate splicin...

Embodiment 3

[0047] see image 3 , which is a schematic diagram of the wire grid assembly provided in this embodiment. The difference from Embodiment 1 is that the wire grid assembly in this embodiment includes a main wire grid polarizer 5 and a secondary wire grid polarizer 4. A plurality of the main wires The grid polarizing elements 5 are spliced ​​side by side along the length direction of the linear light source, the splicing surfaces of two adjacent main wire grid polarizing elements are in the shape of steps, and the secondary wire grid polarizing elements are embedded in adjacent two The splicing surfaces of the main wire grid polarizing elements 5 cover the splicing gap 2 formed by splicing two adjacent main wire grid polarizing elements 5 . Preferably, both the main wire grid polarizing element 5 and the secondary wire grid polarizing element 4 are single-sided wire grid elements.

[0048] There is a vertical gap 6 between the secondary wire grid polarizing element 4 and the mai...

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Abstract

The present invention provides a wire gating module, a polarizing lighting device and an optical alignment device. The wire gating module comprises a plurality of wire gating polarization elements, each wire gating polarization element comprises a substrate and a wire gating; the wire gatings are located at the surface of the substrate; the wire gating polarization elements are spliced side by side in a mode of complementation in a linear light source length direction, the edges of the wire gating polarization elements have tiny gaps or concave-convex portions, and the wire gating polarizationelements are butted against each other to form gaps at the connection positions. The wire gatings of each two adjacent wire gating polarization elements have an overlapping portion at the splicing, the overlapped portion can perform polarization of the light of the linear power source incident into the splicing gaps so as to effectively prevent the non-polarized light irradiated in the wire gating polarization element arrangement direction from being leaked from the splicing gaps and obtain better extinction ratio and illuminance uniformity.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a wire grid component, a polarizing illuminating device and an optical alignment device. Background technique [0002] The technology of photo-alignment is to use a polarizing lighting device to irradiate polarized light of a specific wavelength to the photo-alignment film for alignment, that is, to irradiate polarized light of a specified wavelength on the alignment film, so that the direction of the polarization axis of the polarized light is consistent with or perpendicular to the alignment film. A photoreaction occurs. [0003] A polarizing lighting device generally includes a lighting component and a wire grid component group. Since the alignment film needs ultraviolet light with a wavelength of 250nm to 320nm, the wire grid spacing of the wire grid component is preferably 100nm, and the current semiconductor processing device can process The substrate diameter is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/30G02F1/1337
CPCG02B5/3058G02F1/133788
Inventor 朱树存赵灿武
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD