Supercharge Your Innovation With Domain-Expert AI Agents!

Differential pressure sensor

A pressure difference sensor technology, applied in the field of pressure difference sensors, can solve problems such as adverse electrical effects

Inactive Publication Date: 2019-03-01
EHNDRESS KHAUZER GMBKH KO KG
View PDF9 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A disadvantage with these joining methods is that an electrically conductive joining layer is required, which in turn leads to unfavorable electrical effects when evaluating the pressure measurement signal of the differential pressure measuring cell

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Differential pressure sensor
  • Differential pressure sensor
  • Differential pressure sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0034] figure 1 A schematic view of the platform 101 as part of a differential pressure sensor is shown. figure 1 In particular, it is used to indicate the orientation of other figures in a drawing. Figure 2 to Figure 4 A cross-sectional view showing along the figure 1 Layer structure of different forms of embodiments of the differential pressure sensor of the invention in section AA'. The section is essentially in the center through the figure 1 The platforms shown in .

[0035] In principle, the differential pressure sensor of the invention comprises a differential pressure measuring cell 100 substantially implemented from a semiconductor material. Commonly used as semiconductor material is silicon, which is suitably structured or processed by standardized processes, such as are known from the semiconductor industry. The differential pressure measuring cell 100 is bonded via or via a first bonding layer 116 composed of a metallic material to a first reinforcing element...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention relates to a differential pressure sensor for determining a pressure measurement signal, comprising the following: a differential pressure measuring cell which substantially has a semiconductor material, to which a first and a second pressure can be applied, and which outputs the pressure measurement signal using an electric converter element on the basis of a difference between thefirst and the second pressure; a first stiffening element that preferably has a ceramic or a semiconductor material, is joined to the differential pressure measuring cell by means of a first joining layer, and has a first channel via which the first pressure can be applied to the differential pressure measuring cell; and a second stiffening element that preferably has ceramic or a semiconductor material, is joined to the differential pressure measuring cell by means of a second joining layer, and has a second channel via which the second pressure can be applied to the differential pressure measuring cell; wherein the first and / or the second joining layer has an electrically conductive material, preferably a metal material, and the first and / or second joining layer is used to provide an electric functionality in addition to mechanically connecting the differential pressure measuring cell to the first and second stiffening elements, respectively.

Description

technical field [0001] The invention relates to a differential pressure sensor for determining a pressure measurement signal. Background technique [0002] Differential pressure sensors are used in industrial measurement technology to measure pressure. They include a differential pressure measuring unit (often also referred to as semiconductor sensor or sensor chip), which can be produced by applying processes known from semiconductor technology to undivided wafers. [0003] Such differential pressure measuring cells regularly comprise two platforms, between which a measuring membrane is arranged. In this case, a pressure chamber enclosed below the measuring membrane is provided in each case in each of the two platforms. In measurement operation, one side of the measuring membrane is supplied with a first pressure via a channel in one of the two platforms and the other side of the measuring membrane is supplied with a second pressure via a channel in the second platform. ...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01L9/00G01L9/12G01L13/02G01L19/00G01L19/06
CPCG01L9/0072G01L13/025G01L19/0084G01L19/069
Inventor 蒂莫·科博本杰明·莱姆克
Owner EHNDRESS KHAUZER GMBKH KO KG
Features
  • R&D
  • Intellectual Property
  • Life Sciences
  • Materials
  • Tech Scout
Why Patsnap Eureka
  • Unparalleled Data Quality
  • Higher Quality Content
  • 60% Fewer Hallucinations
Social media
Patsnap Eureka Blog
Learn More

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2025 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com