Ultra-precision spherical surface processing device and method for hemispherical shell resonator

Abstract

The invention provides an ultra-precision spherical surface processing device and method for a hemispherical shell resonator. The ultra-precision spherical surface processing device comprises hemispherical shell resonator inner spherical surface ultra-precision processing device, hemispherical shell resonator outer spherical surface ultra-precision processing device, a hemispherical shell resonator filling sealing method and related device, a spherical shell port inverted inner spherical surface angle device, an outer spherical surface chamfering indicator, an inner spherical chamfering indicator, and a supporting rod adaptive elastic grinding head device. The ultra-precision spherical surface processing method includes the following steps of first, a precision spherical surface processingmethod; second, a various parameter combination sequence method; third, a precision spherical surface processing grinding head design method and an abradant material and particle size control method;fourth, micro-stressed spherical surface precision processing elastic loading force control method; fifth, hemispherical shell resonator filling sealing method; sixth, hemispherical shell resonator precision measurement method, specifically, a true sphericity measurement method and a coaxial measurement method are included; seventh, a spherical shell port chamfering and supporting rod R roundingmethod; and eighth, a supporting rod adaptive elastic grinding head use method.

Description

technical field [0001] The invention belongs to the technical field of ultra-precision processing of fused silica glass spherical shell-shaped ultra-thin-walled parts, and relates to a processing principle, a micro-stress processing method and related devices. Specifically, it relates to a hemispherical resonator ultra-precision spherical processing device and processing method. Background technique [0002] The hemispherical resonant gyroscope is the most promising gyroscope in the contemporary era. It has the tendency to replace modern fiber optic gyroscopes, laser gyroscopes, electrostatic gyroscopes, and three-floating gyroscopes. The United States, France, and Russia have taken the lead in applying them to modern aerospace, aviation, navigation, weapons, and modern transportation. Tool is on. The hemispherical resonator is a thin-walled ultra-precision spherical shell part of fused silica glass, and the hemispherical resonator spherical ultra-precision machining technol...

AI Technical Summary

Problems solved by technology

At present, there is a large gap between my country and foreign countries in the processing accuracy of hemispherical gyroscopes, which cannot meet the accuracy requirements of hemispherical gyro: According to the calculation of the error mathematical model, the accuracy requirements are that the true sphericity of the harmonic oscillator is ≤0.1μm, and the surface roughness is Ra. ≤0.01μm; the coaxiality of the spherical surface of the inner and outer spherical shells to the center support ≤1.5μm; the unevenness of the wall thickness of the spherical shell ≤0.5μm; it belongs to sub-micron precision and is a key technical research project in my country

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