Scribing apparatus
A scribing and equipment technology, applied in glass manufacturing equipment, glass cutting devices, glass production, etc., can solve problems such as the inability to cut and bond substrates smoothly, and achieve the effect of accurate modification and easy cutting
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[0086] As in the first embodiment of the present invention, when there are multiple media 10 between the bonded substrates S, the first laser beam irradiation head 410 and the second laser beam irradiation head 420 move in the direction of the Z axis, and can sequentially irradiate A type of laser beam for a medium 11 and a second medium 12 .
[0087] The scribing apparatus in the first embodiment of the present invention irradiates a plurality of kinds of media 10 with laser beams respectively corresponding to kinds of a plurality of kinds of media 10 arranged in a predetermined pattern between bonded substrates S, so that at least a part of the media 10 is modified. , forming scribe lines on the bonded substrate S along the pattern of the medium 10 to cut the bonded substrate S. Thereby, it becomes easy to cut the bonded board|substrate S together with the medium 10 provided between the bonded board|substrates S. As shown in FIG.
[0088] Below, refer to Figure 10 , to de...
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