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Improved OLED evaporation device and method for improving evaporation shadow effect

A technology of evaporation and evaporation source, applied in the field of OLED evaporation, can solve problems such as unsatisfactory effect, and achieve the effect of eliminating shadow effect

Pending Publication Date: 2019-03-29
LAKESIDE PHOTOELECTRONICS TECH JIANGSU CO
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The conventional method is to reduce the weight of the net in the mask and minimize the distance between the substrate and the mask to weaken the shadow effect caused by the above problems, but the results are not ideal

Method used

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  • Improved OLED evaporation device and method for improving evaporation shadow effect
  • Improved OLED evaporation device and method for improving evaporation shadow effect
  • Improved OLED evaporation device and method for improving evaporation shadow effect

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Embodiment 1

[0027] Such as Figures 2 to 5 As shown, an improved OLED evaporation device includes a substrate 1, a mask plate 2 and an evaporation source 3 arranged in sequence from top to bottom, and a collimation filter 4 is arranged below the mask plate 2, and the The collimation filter 4 includes several channels 5 , and each channel 5 of the collimation filter 4 is arranged in alignment with the corresponding opening on the mask plate 2 above it.

[0028] In this embodiment, the collimation filter 4 is made of metal, glass, polymer or semiconductor material. The channel 5 has a high aspect ratio, and generally the height of the channel 5 is more than five times its width (square opening). The opening of the channel 5 has the same shape and size as the opening of the mask plate 2 .

[0029] The mask 2 is a fine metal mask made of Invar alloy.

[0030] The present invention also provides a method for improving the evaporation shadow effect of an improved OLED evaporation device. The...

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Abstract

The invention discloses an improved OLED evaporation device. The improved OLED evaporation device comprises a substrate, a mask plate and an evaporation source which are sequentially arranged from topto bottom; a collimating filter is arranged below the mask plate, wherein the collimating filter comprises a plurality of channels, and each channel of the collimating filter is correspondingly aligned with an opening corresponding to the mask plate above the collimating filter. The invention further discloses a method for effectively improving the evaporation shadow effect through the OLED evaporation device. The improved OLED evaporation device does not need to transform an existing mask plate, only through the collimating filter provided by the improved OLED evaporation device, the organicmaterial molecules can be effectively prevented from being deposited to the adjacent range outside the preset region, and the purpose of eliminating the shadow effect is achieved.

Description

technical field [0001] The invention relates to the technical field of OLED evaporation, in particular to an improved OLED evaporation device and a method for improving the shadow effect of evaporation. Background technique [0002] At present, the conventional means to improve the shadow effect of OLED mainly focus on the optimized design of the mask plate. Due to the large area of ​​the mask plate, the problem of sagging of the mask plate caused by gravity will occur, which increases the gap between the substrate and the mask plate. [0003] During the evaporation process of a conventional OLED device, due to a certain gap between the substrate and the mask, the sublimated organic material molecules will be deposited outside the preset evaporation area, resulting in a shadow effect, such as figure 1 Shown is a schematic diagram of an existing evaporation device. Organic materials are stored in an evaporation source, heated at high temperature to form gaseous molecules, di...

Claims

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Application Information

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IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 吴远武褚天舒
Owner LAKESIDE PHOTOELECTRONICS TECH JIANGSU CO
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