A kind of graphene electro-optic modulator and preparation method thereof

Abstract

The invention discloses a graphene electro-optic modulator and a preparation method thereof, comprising: a substrate whose length, width and height are respectively defined as X, Y, and Z directions; an insulating material layer arranged on the substrate; and arranged at intervals along the X direction. The optical input end and the optical output end in the insulating material layer; the sub-wavelength grating waveguide structure between the optical input end and the optical output end, including the first graphene layer and the refractive index layer arranged up and down in the insulating material layer and The second graphene layer arranged on the upper surface of the insulating material layer, the two ends of the refractive index layer are respectively connected to the light input end and the light output end, and the first graphene layer extends outward from the refractive index layer side and is connected to the first metal An electrode, the second graphene layer extends outward from the other side of the refractive index layer and is connected to a second metal electrode, the refractive index layer includes high refractive index units periodically arranged along the X direction, and between two adjacent high refractive index units The spaces are filled with low-index elements. The invention has the characteristics of high modulation efficiency and high 3dB electro-optical modulation bandwidth.

Description

technical field [0001] The invention relates to the technical field of electro-optical modulators, in particular to a graphene electro-optical modulator and a preparation method thereof. Background technique [0002] In optoelectronic integrated circuits, optical modulators are one of the most important integrated devices, which convert electrical signals into high-rate optical data. Optical modulators use materials with thermo-optic effects, electro-optic effects, magneto-optic effects, and electro-absorption effects to modulate the phase, amplitude, and polarization of light in combination with Mach Zeder interferometer (MZI), micro-ring resonators, and other structures. [0003] As a new material, graphene has excellent optoelectronic properties, such as ultra-broadband light wavelength response (visible light to terahertz band), strong interaction with light, tunable electrical conductivity, ultrafast carrier mobility, etc. Combined with the silicon-based optical wavegu...

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Problems solved by technology

At present, it is difficult for graphene electro-optic modulators to achieve a balance between modulation efficiency, 3dB electro-optic bandwidth, and device manufacturing process complexity.

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