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Automatic circular wafer rewinding mechanism

A silicon wafer rewinding technology, which is applied in the field of automatic circular silicon wafer rewinding mechanism, can solve the problems of high error rate in manual work and the need for special personnel to operate, so as to achieve stable and efficient output, avoid metal contamination, and avoid metal contamination. pollution effect

Pending Publication Date: 2019-04-02
TIANJIN HUANXIN TECH DEV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0009] The purpose of the present invention is to provide an automatic circular silicon wafer rewinding mechanism, which solves the shortcomings of high manual operation error rate and special operation in the prior art

Method used

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  • Automatic circular wafer rewinding mechanism
  • Automatic circular wafer rewinding mechanism
  • Automatic circular wafer rewinding mechanism

Examples

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Embodiment Construction

[0032] Such as Figure 1-3 As shown, this example is an automatic circular wafer rewinding mechanism, which is used in an automatic circular wafer rewinding machine. Reference Figure 1-2 , The automatic circular wafer rewinding machine includes a frame 10, a first processing room and a second processing room. The first processing room and the second processing room are relatively isolated. The first processing room is a clean area, and the second processing room is In the metal area, a film rewinding mechanism 5 is arranged in the middle of the frame 10. The film rewinding mechanism 5 includes a first film rewinding part and a second film rewinding part. A rewinding part is arranged in the first processing chamber, and the second rewinding part is arranged in the second processing chamber. reference image 3 Among them, the rewinding part includes: a transmission device 52, a sensor, a transmission drive device 53 and a positioning block. The transmission device 52 can be sele...

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Abstract

The invention provides an automatic circular wafer rewinding mechanism. The automatic circular wafer rewinding mechanism comprises a rack, a first rewinding portion, a second rewinding portion and a transmission device. The first rewinding portion and the second rewinding portion are oppositely isolated and arranged on the rack, and the transmission device penetrates the first rewinding portion and the second rewinding portion and is configured to transmit a circular wafer. The automatic circular wafer rewinding mechanism solves the defects of manual operation of basket rewinding with the samepitch and the same specification and avoids the problem of the metal pollution generated by the wafer basket of a cleaning area and the wafer basket of a metal area, allows the wafer baskets of the cleaning area and the metal area to be completely isolated, avoids metal pollution of the wafer baskets of the cleaning area and achieves stable and efficient production.

Description

Technical field [0001] The invention belongs to the technical field of silicon wafer production machinery, and particularly relates to an automatic circular silicon wafer rewinding mechanism. Background technique [0002] With the rapid development of the semiconductor industry, the production capacity of semiconductor silicon wafers is expanding day by day. An automated equipment is needed to realize the rewinding of round silicon wafers in the same wafer basket. Various operating areas are involved in the production of silicon wafers, which are roughly divided into clean areas (such as 10,000-level clean, 1,000-level clean, etc.), ash areas, and metal areas. Due to the difference in cleanliness, tooling and film baskets must not be used across regions during use. For example, a film basket in a clean area can only be used in a clean area, and a film basket in a metal area can only be used in a metal area. Therefore, the problem of film rewinding between the same kind of film ...

Claims

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Application Information

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IPC IPC(8): H01L21/677H01L21/68
CPCH01L21/67763H01L21/68
Inventor 甄辉齐风杨玉聪徐长坡陈澄梁效峰李亚哲黄志焕王晓捧王宏宇王鹏徐艳超
Owner TIANJIN HUANXIN TECH DEV
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