Substrate handling robot
A technology for substrate handling and manipulators, which is applied in the directions of manipulators, conveyor objects, transportation and packaging, etc., and can solve problems affecting the manufacturing process, fragments, and inability to accurately align the substrate 101
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[0027] In order to further illustrate the technical means adopted by the present invention and its effects, the following describes in detail in conjunction with preferred embodiments of the present invention and accompanying drawings.
[0028] see image 3 and Figure 4 , the present invention provides a substrate handling robot, comprising: a carrying arm 10 and a rolling mechanism 20 disposed on the carrying arm 10 and located at the first end edge of the carrying arm 10; the rolling mechanism 20 includes a mounting seat 21, Roller 22, rocking bar 23 and elastic member 24;
[0029] The mounting seat 21 is arranged on the carrying arm 10, the rocker 23 is arranged obliquely relative to the horizontal plane in a direction close to the second end of the carrying arm 10, and one end of the rocking rod 23 close to the first end of the carrying arm 10 Connect the mounting seat 21, the end of the rocker 23 close to the second end of the carrying arm 10 is connected to the roller...
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