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Space motion device for hemispherical resonance gyro coating

A hemispherical resonant gyroscope and space motion technology, which is applied in sputtering coating, ion implantation coating, vacuum evaporation coating and other directions, can solve the problems of poor coating uniformity, low efficiency, and difficult to control the qualification rate of hemispherical resonant gyroscope parts. Achieve the effect of ensuring the uniformity of the film thickness and improving the uniformity of the film

Inactive Publication Date: 2019-04-16
SHANGHAI AEROSPACE CONTROL TECH INST
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the coating uniformity of the hemispherical resonator gyroscope parts is poor by using the commonly used traditional method, the pass rate is difficult to control, and the efficiency is low

Method used

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  • Space motion device for hemispherical resonance gyro coating
  • Space motion device for hemispherical resonance gyro coating
  • Space motion device for hemispherical resonance gyro coating

Examples

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Embodiment

[0019] The present invention will be further described below in conjunction with embodiment. The present invention includes the following content, but is not limited to the following content.

[0020] In order to make the above objects, features and advantages of the present invention more comprehensible, specific implementations of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0021] The device can realize various spatial movements such as revolution, rotation, swing, rotation+revolution, rotation+swing, revolution+swing, revolution+rotation+swing during the coating process of hemispherical resonant gyro, such as figure 1 , figure 2 shown. The space motion device includes: a revolution motor, an autorotation motor, and a swing motor, and the revolution motor is connected with a revolution disk through a revolution shaft system to realize revolution motion. The self-rotating motor is connected with the jig through ...

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Abstract

The invention discloses a space motion device for hemispherical resonance gyro coating. The space motion device for hemispherical resonance gyro coating comprises a revolution motor, a rotation motor,and a swing motor; the revolution motor is connected with a revolution plate through revolution shafting to achieve revolution motion; the rotation motor is connected with a fixture through rotationshafting, and full angle rotation of the rotation motor is realized through an elastic wire rope; and the swing motor converts rotation into up-and-down movement through swing shafting, and the swingmotor drives a rack to actuate a gear through a shift fork to achieve swing of a work piece. According to the space motion device for hemispherical resonance gyro coating, space motion can be realizedin the hemispherical resonance gyro coating process; whole surface one-time film formation is realized; three types of motion of revolution, rotation, and swing are integrated in one; the revolutionspeed, the rotation speed, and the rotation direction are independently adjusted; the speed of upward swing , the speed of downward swing , an elevation angle of swing, and up and down dwell time canbe optionally set according to requirements; and coating uniformity is improved, the problem of the low qualified rate of hemispherical resonance gyro coating is solved, and production efficiency is improved.

Description

technical field [0001] The invention relates to a hemispherical resonant gyroscope coating space motion device, in particular to the field of hemispherical resonant gyroscope coating. Background technique [0002] The traditional vacuum coating equipment turret can only realize the function of revolution + rotation, without swing function, and cannot independently control the speed of revolution and rotation. For the coating on each surface of the hemispherical resonant gyro parts, it is impossible to form a film at one time, and it is impossible to complete the vacuum coating in one clamping, and it is necessary to coat the parts multiple times. Therefore, the coating uniformity of the hemispherical resonator gyroscope parts is poor by using the commonly used traditional method, the pass rate is difficult to control, and the efficiency is low. Contents of the invention [0003] The purpose of the present invention is to design a hemispherical resonant gyro coating space ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/50
CPCC23C14/505
Inventor 朱蓓蓓兰洁申振丰许剑锋陈肖郭凌曦程辉袁超孙晴晗
Owner SHANGHAI AEROSPACE CONTROL TECH INST
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