Wide-range wind speed sensor with dual heating electrodes and manufacturing method thereof

Abstract

The invention relates to a wide-range wind speed sensor with dual heating electrodes and a manufacturing method thereof, which is used for improving the detection sensitivity and speed and belongs tothe field of wind speed sensors. The wind speed sensor is characterized in that a heater electrode is located at the center of an octagonal substrate, the heater electrode is composed of a square coiled structure surrounded by dual heaters at the center and four extraction electrodes, the four extraction electrodes are respectively led out from four corners of the square coiled structure, and thewidth of each reference electrode is gradually increased; each temperature detector electrode is of a symmetrical structure and includes a fan-shaped body and two detection electrodes which are led out from the edge of the body and extend to the corresponding edge of the octagonal substrate, four temperature detector electrodes are distributed on the octagonal substrate around the heater electrode, and each two adjacent extraction electrodes of the heater electrode are provided with one temperature detector electrode therebetween; and there is a heat isolation groove on the octagonal substratebetween each temperature detector electrode and the heater electrode.

Description

technical field [0001] The invention relates to a wind speed sensor, in particular to a double heating electrode wide-range wind speed sensor and a manufacturing method thereof. Background technique [0002] Wind speed sensors are widely used in wind power generation, mine ventilation, solar power generation wind direction control and gas flow monitoring and other fields. [0003] The existing aluminum nitride ceramic substrate is used as the substrate, which is very stable in an inert high-temperature environment. In the air, when the temperature is higher than 700 ° C, micro-oxidation will occur on the surface of the aluminum nitride material, forming a 5-10 nanometer thick Al 2 o 3 The oxide film plays a protective role. At the same time, the temperature of the nearby air is heated through the middle heating electrode. The temperature of the surrounding air is measured by temperature detection, and the wind speed is measured by using the principle of thermal temperature...

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Problems solved by technology

[0003] The existing aluminum nitride ceramic substrate is used as the substrate, which is very stable in an inert high-temperature environment. In the air, when the temperature is higher than 700 ° C, micro-oxidation will occur on the surface of the aluminum nitride material, forming a 5-10 nanometer thick Al 2 o 3 The oxide film plays a protective role. At the same time, the temperature of the nearby air is heated through the middle heating electrode. The temperature of the surrounding air is measured by temperature detection, and the wind speed is measured by using the principle of thermal temperature difference. Problems such as high temperature and slow response rate, complex silicon-based structure process, poor compatibility, and low product reliability in high-temperature and harsh environments have always restricted the development and application of micro-thermal wind speed sensors.

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