Bellow diaphragm type high-cleanness and high-pressure pressure reducing valve

Abstract

The invention provides a bellow diaphragm type high-cleanness and high-pressure pressure reducing valve which comprises a parent body, an upper cover, a valve seat, a valve rod, a pressure regulatingdevice and a bellow component; the upper cover covers the parent body; the valve seat is installed on a nozzle; the nozzle and the parent body are closely locked; the lower end of the valve rod is charged into a center hole of the parent body after being sequentially provided with a reset spring and a friction washer; the pressure regulating device comprises a knob, a spring seat, a pressure regulating spring, a spring button and a regulating screw rod; the bellow component is arranged in a connecting cavity of the parent body and the upper cover; the bottom of the bellow component is connected with the parent body; the upper side of the bellow component is contacted with the spring seat; the lower side of the bellow component is contacted with the valve rod; and the bellow component drives the valve rod to move downwards so as to enable the valve rod to be separated from a valve seat sealing pair. By replacing a metal diaphragm or a piston with a bellow due to the advantage of high compression strength and large deformation amount of the bellow, the bellow diaphragm type high-cleanness and high-pressure pressure reducing valve keeps the characteristics of conveying gas without leakage and pollution of a stainless steel diaphragm pressure reducing valve and also has the advantages of high output pressure and high cleanness.

Description

technical field [0001] The invention relates to a decompression valve, in particular to a bellows diaphragm type high-clean and high-pressure decompression valve. Background technique [0002] In the use of special gases in semiconductor and other industries, due to the high toxicity of special gases and high cleanliness requirements, sealed diaphragm valves are used as control valves in the supply and transportation of special gases. Since the valve itself has no stem dynamic sealing structure, there is no leakage point in theory, and it can be completely leak-free, also commonly known as a non-leakage valve. It can prevent the poisonous gas from leaking and polluting the environment, and can also prevent the transported gas from being polluted by the seal. Although non-metallic synthetic materials have good flexibility, their strength is not high, and they can more or less volatilize organic compounds or adsorb transport gases, so they are not suitable for special gas tra...

AI Technical Summary

Problems solved by technology

However, due to the limitation of the operating pressure, the high-pressure pressure reducing valve can only adopt a piston-type dynamic sealing structure, which more or less has the problem of leakage and pollution, as well as the problem of volatilization and adsorption of synthetic materials.

[0007] Due to the low pressure resistance of the diaphragm, the existing high-pressure output pressure reducing valve can only use a piston type pressure reducing valve, which requires the use of rubber rings and grease, which will pollute the high-clean gas, and requires a filter at the rear end to meet the cleanliness of the gas. degree requirements

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