Photonic integrated circuit
A photonic integrated circuit, transverse electrical technology, applied in the coupling field of optical fiber, can solve the problems of expensive, not allowing sufficient limitation of transverse magnetic component, optical power loss, etc.
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[0043] figure 1 is a cross-sectional view of a photonic integrated circuit according to one embodiment.
[0044]The integrated circuit includes a semiconductor substrate or film 5, which includes various active hardware components 51 and passive hardware components 50, and the semiconductor substrate or film 5 is fabricated on a buried insulating layer 9, which is usually prepared by those skilled in the art. Referred to by the skilled person by the acronym BOX (“buried oxide”), the buried insulating layer 9 itself is produced on a carrier substrate (not shown).
[0045] The semiconductor substrate 5 is covered by an interconnect region 6 (or BEOL, "back end of line" according to an acronym well known to those skilled in the art), which comprises a plurality of metal layers 60, 61, 62, 63.
[0046] Each metal layer comprises one or more metal tracks 601 encapsulated in an insulating material or intermetal dielectric (IMD), here silicon dioxide. The metal tracks are connecte...
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