Piezoelectric mems decoupling structure and mems gyroscope

Abstract

The invention discloses a piezoelectric MEMS decoupling structure and an MEMS gyroscope. The piezoelectric MEMS decoupling structure comprises a T-shaped beam structure, a second top electrode, a first top electrode and a third top electrode, wherein the T-shaped beam structure comprises a transverse beam and a longitudinal beam which are integrated, the T-shaped beam structure sequentially comprises a substrate, a bottom electrode layer and a piezoelectric material layer from bottom to top, the second top electrode is adopted as a detecting electrode, is in a T shape, is located above the T-shaped beam structure and is symmetric about the center line of the longitudinal beam, and the first top electrode and the third top electrode are adopted as drive electrodes, located above the longitudinal beam, symmetrically distributed at the two sides of the center line of the longitudinal beam and dependent from the portion, on the longitudinal beam, of the second top electrode. According to the decoupling structure, the whole shape is set as the T-shaped beam structure including the integrated transverse beam and longitudinal beam, the T-shaped detecting electrode symmetric about the center line of the longitudinal beam and the two drive electrodes symmetrically distributed on the longitudinal beam are arranged on the T-shaped beam structure, complete decoupling is achieved, and the detection precision of the gyroscope can be effectively improved.

Description

technical field [0001] The disclosure belongs to the technical field of microelectronics, and relates to a piezoelectric MEMS decoupling structure and a MEMS gyroscope. Background technique [0002] Micro-electromechanical systems (MEMS, Micro-electro Mechanical Systems) devices are widely used in the field of consumer electronics due to their advantages of small size, low power consumption, low cost, and easy integration. MEMS gyroscope is the core device in inertial navigation, which can detect the angular velocity of rotating body according to the principle of Coriolis effect. According to the basic principle of the MEMS gyroscope, the MEMS gyroscope includes two mutually orthogonal resonant modes, namely: driving mode and detection mode. When excited by a drive signal, the gyroscope structure resonates. When there is an angular velocity, due to the Coriolis effect, there will be a detection signal output on the detection electrode under the action of Coriolis force. ...

AI Technical Summary

Problems solved by technology

However, since the gyroscope based on the Coriolis effect itself relies on coupling to achieve angular velocity detection, it is difficult to achieve complete decoupling

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