Positive and negative X-side detection device and method based on utilization of piezoelectric detection method

Abstract

The invention provides a positive and negative X-side detection device based on the utilization of a piezoelectric detection method, which comprises a lower plate and an upper plate, wherein two sidesof the lower plate are respectively provided with lower plate guide rails, the head and tail ends of each lower plate guide rail are respectively provided with abutting plates, and two sides of the upper plate are respectively provided with upper plate guide rail brackets matched with the lower plate guide rails in use. The invention further provides a positive and negative X-side detection method based on the utilization of the piezoelectric detection method, which comprises the steps of 1) placing a substrate to be detected on the lower plate; 2) pushing the upper plate to move from the tail end to the head end of the lower plate, enabling an upper plate electrode to push the substrate to be detected until the other end of the substrate to be detected is contacted with a lower plate electrode; and 3) watching the display of a charge amplifier meter. The positive and negative X-side detection device and method adopt a two-plane contact extrusion device to avoid edge and corner damageto the thin substrate of devices used in the Internet of Things, and introduce an elastic extrusion structure and an electrode contact plane at the same time so as to minimize the edge and corner damage to the thin substrate in the testing process.

Description

technical field [0001] The invention relates to positive and negative X-surface detection of a substrate in the manufacture of quartz crystal devices for the Internet of Things, and in particular to a positive and negative X-surface detection device and a detection method based on a piezoelectric detection method. Background technique [0002] Artificial piezoelectric quartz crystals have excellent properties of piezoelectric effect and frequency stability under wide temperature changes, and are widely used in the manufacture of Internet of Things devices. [0003] When growing quartz crystals for the Internet of Things, due to the anisotropy of the crystals, the growth rates in different directions of the crystals are different, especially the electric axis (X) direction of the crystal, its positive electric axis (+X) and negative electric axis (-X). Growth rates in different directions are different. In order to prevent collision and adhesion during crystal growth, the see...

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Problems solved by technology

[0006] The patent "ZL20092014666.9 Piezoelectric Quartz Crystal Positive and Negative X-direction Identification Device" announced a positive and negative X-surface detection device for quartz crystal devices based on the piezoelectric detection method. Thin substrates cause edge and corner damage. When measuring small substrates used in the Internet of Things, it cannot be effectively fixed by hand for detection. In addition, because the substrate is held by hand, induced charges will be generated, which will cause the detection amplifier to oscillate, resulting in measurement errors.

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