Multi-degree-of-freedom micro-motion platform with multi-level linkage output

A technology of micro-motion platform and output platform, which is applied in the field of micro-motion platform, can solve the problems of insufficient output table, single direction, and less degrees of freedom, etc., and achieves convenient pre-tightening of piezoelectric actuators, easy guarantee of machining accuracy, and no mechanical friction effect
CN109732547BActive Publication Date: 2021-12-21NINGBO UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NINGBO UNIV
Publication Date
2021-12-21

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Abstract

A multi-degree-of-freedom micro-motion platform with multi-stage linkage output relates to a micro-motion platform, which includes a working platform, a flexible amplifying unit structure, a base and a support rod; the working platform is supported by a support rod connected to the flexible amplifying unit structure; each The flexible amplifying unit structure includes a stand and a piezoelectric stack driver; the stand includes a support one and a support two, a fixed rod, an output rod, an output platform, a rocker, a guide rod and an amplifying mechanism; the amplifying mechanism It includes amplifying rod 1, amplifying rod 2 and amplifying rod 3; a vertically arranged support rod is installed on each output platform, and a spherical hinge is installed on the top of the support rod, and the spherical hinge is detachably connected with the working platform, and the fixed rod One of the rods is detachably connected to the base. The invention has simple structure, reasonable design, convenient assembly and disassembly, and improves the working displacement of the working platform.
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Description

technical field

[0001] The invention relates to a micro-motion platform, in particular to a multi-degree-of-freedom micro-motion platform with multi-stage linkage output. Background technique

[0002] The multi-degree-of-freedom micro-motion platform is a micro-displacement mechanism that transmits force and displacement through a flexible hinge mechanism that can produce elastic deformation and can translate or rotate with multiple degrees of freedom. And it is driven by a piezoelectric actuator, so it has high displacement resolution, fast response speed, large driving force and rigidity, small size and strong bearing capacity. Therefore, it plays an increasingly important role in precision machining and measurement, optical fiber docking, microelectronics engineering, cell micromanipulation and other technical fields that require micro / nano positioning. Specific applications include in the processing of micro-nano parts, the micro-feeding of the tool or the compensation ...

Claims

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