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Sensor with integrated processing of sensing element and elastic sensitive element and its preparation

A technology of elastic sensitive elements and sensing elements, which is applied in the field of sensors, can solve problems such as increasing the difficulty of sensors, and achieve the effect of improving design flexibility

Active Publication Date: 2021-10-26
SUZHOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the existing force-sensitive sensor, the design and preparation of the elastic sensitive element and the sensing element are independent, and the sensing element is combined with the elastic sensitive element through sintering, bonding, etc., which greatly increases the difficulty of sensor design and preparation

Method used

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  • Sensor with integrated processing of sensing element and elastic sensitive element and its preparation
  • Sensor with integrated processing of sensing element and elastic sensitive element and its preparation
  • Sensor with integrated processing of sensing element and elastic sensitive element and its preparation

Examples

Experimental program
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Effect test

Embodiment 1

[0056] This embodiment provides a sensor for detecting vacuum, including an elastic sensitive element, a sensing element and a resistance acquisition system, wherein the elastic sensitive element is a polyimide tube 1, and the sensing element is surrounded by polyimide A circle of carbon wire 2 on the amine tube 1 is obtained by laser carbonization of the corresponding position of the polyimide tube 1. The sensing element is perpendicular to the length direction of the tube axis of the polyimide tube 1. Two positions of the sensing element The wires are respectively connected with silver glue, and the two wires are respectively connected with the resistance acquisition system. The two ends of the polyimide tube 1 are respectively sealed with discs, and the material of the discs is polymethyl methacrylate (PMMA). .

[0057] The preparation method of the sensor of this embodiment comprises the following steps:

[0058] A commercially available tubular polyimide (inner diameter×...

Embodiment 2

[0060] This embodiment provides a sensor for detecting touch pressure, including an elastic sensitive element, a sensing element and a resistance acquisition system, wherein the elastic sensitive element is a polyimide tube 1, and the sensing element is a polyimide tube 1 along the polyimide A carbon line 2 extending in the length direction of the tube axis of the amine tube 1 is obtained by laser carbonization at the corresponding position of the polyimide tube 1, the sensing element is parallel to the tube axis length direction of the polyimide tube 1, and the carbon line 2 Both ends of the polyimide tube 1 are respectively connected with wires through silver glue, and the two wires are respectively connected with the resistance acquisition system. methyl ester (PMMA).

[0061] The preparation method of the sensor of this embodiment comprises the following steps:

[0062] A commercially available tubular polyimide (inner diameter × wall thickness = 2.5mm × 0.06mm) is used a...

Embodiment 3

[0064] This embodiment provides a sensor for detecting viscosity, including an elastic sensitive element, a sensing element and a resistance acquisition system, wherein the elastic sensitive element is a polyimide tube 1, and the sensing element is spirally arranged on the polyimide The carbon wire 2 on the surface of the amine tube 1 is obtained by laser carbonization at the corresponding position of the polyimide tube 1, and the angle between the inclined direction of the spiral carbon wire and the length direction of the tube axis of the polyimide tube 1 is 45°, The two ends of the carbon wire 2 are respectively connected with wires through silver glue, and the two wires are respectively connected with the resistance acquisition system, and the two ends of the polyimide tube 1 are respectively connected with one end of the first steel pipe 4 and the second steel pipe 5, The other end of the first steel pipe 4 is fixedly connected to the fixed end 6, the other end of the seco...

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Abstract

The invention relates to a sensor integrated with the processing of the sensing element and the elastic sensitive element, comprising an elastic sensitive element, a sensing element and a resistance acquisition system, the sensing element is formed on the surface of the elastic sensitive element in situ, the At least two parts of the sensing element are used as electrodes and are respectively electrically connected to the resistance acquisition system. Wherein, the elastic sensitive element has a three-dimensional structure, the elastic sensitive element includes a carbonizable polymer layer disposed on at least one surface thereof, and the sensing element is obtained by carbonizing a part of the carbonizable polymer layer. The present invention directly prepares the sensing element on the elastic sensitive element of the three-dimensional structure, and the elastic sensitive element and the sensing element do not need to be recombined through complex methods, thereby realizing the design, preparation and processing of the elastic sensitive element of the sensor and the sensing element. integration.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to a sensor with integrated processing of a sensing element and an elastic sensitive element and its preparation. Background technique [0002] A force sensitive sensor is a device or device that converts a stress / strain signal into an output signal. Force-sensitive sensors are usually composed of elastic sensitive elements and sensing elements. Among them, the elastic sensitive element refers to the part of the sensor that can directly feel the stress / strain. The shape of the elastic sensitive element has a structure / shape such as a column, a cantilever beam, a bellows diaphragm, and a thin-walled cylinder, which can be selected according to different measured parameters or Design different structural forms. The sensing element refers to the part of the sensor that can convert the stress / strain output by the elastic sensitive element into an electrical signal suitable for transmi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01D5/12G01D5/16
Inventor 刘涛段晓爽姚艳波
Owner SUZHOU UNIV