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Automatic focusing method for surface defect of optical element and device thereof

An automatic focusing and defect detection technology, applied in the direction of optical testing flaws/defects, etc., can solve the problems of manual focusing difficulty on polished optical surfaces, and achieve the effect of simple implementation, improved focusing accuracy and focusing efficiency

Pending Publication Date: 2019-05-21
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The invention provides an automatic focusing method and device for detecting surface defects of optical components, aiming to solve the problem of manual focusing on polished optical surfaces under high-magnification microscopic imaging

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  • Automatic focusing method for surface defect of optical element and device thereof
  • Automatic focusing method for surface defect of optical element and device thereof
  • Automatic focusing method for surface defect of optical element and device thereof

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Embodiment Construction

[0023] The present invention will be described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0024] Such as figure 1 As shown, in the embodiment of the present invention, an automatic focusing device for detecting surface defects of optical elements includes a micro projection module 1 , a light splitting element 2 , an objective lens 3 , a focusing surface 4 , and a projection monitoring module 5 . Wherein, the micro-projection module 1 is made up of a projection chip 1a and a projection optical system 1b, wherein the micro-projection module 1, the light splitting element 2 and the projection monitoring module 5 are connected together through a mechanical housing, and the objective lens 3 is connected on the together, and are controlled by the focus signal, and finally achieve automatic focus. Projection monitoring module 5 is made up of monitoring optical system 5a and camera 5b, as figure 2 shown. Among them, the monitoring op...

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Abstract

The invention relates to an automatic focusing method for a surface defect of an optical element and a device thereof, wherein the method and the device belong to the field of photoelectric detectiontechnology. The focusing device comprises a miniature projection module, a light splitting element, an object lens and a projection monitoring module. The miniature projection module projects a generated specific pattern to the surface of a to-be-focused optical element. The projection monitoring module photographs the reflected projection image. The acquired projection image which is acquired bythe monitoring module is analyzed through a computer. A focusing controller transmits a control signal to a focusing motor. The position of a to-be-focused surface is adjusted in an optical axis direction until the image which is photographed by the monitoring module is clearest, thereby realizing an automatic focusing function. The method and the device effectively settles problems of high focusing difficulty and low efficiency in a microscopic imaging system and can realize automatic focusing in performing surface defect detection on planar, spherical and aspheric optical elements.

Description

technical field [0001] The invention belongs to the field of photoelectric technology detection, in particular to an automatic focusing method and device for detecting surface defects of optical elements. Background technique [0002] High-end optical components put forward higher and higher requirements on the surface quality of optical components, and the resolution ability of surface defects is required to be at the micron or even sub-micron level. Surface defects of optical components not only affect the appearance of optical components, but also have a destructive effect on the performance of optical systems. [0003] Nowadays, in addition to manual visual inspection, it is commonly used to use the principle of microscopic imaging to measure surface defects of "what you see is what you get" in the detection of surface defects of optical components. The microscope can realize the observation of tiny defects, and the use of high-magnification microscopes can obtain sub-m...

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Application Information

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IPC IPC(8): G01N21/95
Inventor 全海洋胡小川李声侯溪徐富超付韬韬伍凡
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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