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A high damage threshold laser lens and its manufacturing method

A technology with high damage threshold and manufacturing method, applied in optics, mirrors, optical components, etc., can solve the problems of reduced damage threshold of zirconia thin film, limited application of zirconia materials, insufficient auxiliary energy, etc.

Active Publication Date: 2020-06-19
湖南麓星光电科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The filling density value of the zirconia film is closely related to the vacuum chamber pressure, substrate temperature, deposition rate and steam incident angle, especially the insufficient auxiliary energy of the domestic ion source, which directly leads to a further reduction of the damage threshold of the zirconia film. This greatly limits the application of zirconia materials in high-power laser thin films

Method used

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  • A high damage threshold laser lens and its manufacturing method
  • A high damage threshold laser lens and its manufacturing method
  • A high damage threshold laser lens and its manufacturing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] Example 1 is a laser lens made by directly evaporating zirconia material, and the measured average damage threshold of the laser lens is 5.6 J / cm 2 10ns@355nm.

[0048] 1. Directly evaporate zirconia material to make reflective film:

[0049] Use TFCALC35 software to design 355nm reflective film, center wavelength 393nm, incident angle 45°, incident medium air, base material JGS1, exit medium JGS1, design layers 30 layers, including 15 layers of zirconium dioxide, each layer thickness 48.77nm, cumulative thickness 731.6nm, 15 layers of silicon dioxide, the thickness of each layer is 66.96nm, the cumulative thickness is 1004.35nm, and the total thickness of the film is 1735.96nm. Among them, the refractive index of zirconia at 355nm is 2.038, the refractive index of silicon dioxide at 355nm is 1.467, and the reflectivity of the designed film layer at 355nm is 99.8%. The glass substrate adopts domestic JGS1 grade fused silica, the size is D25.4*5mm, the surface shape r...

Embodiment 2

[0053] like figure 1 and figure 2 Shown, a kind of manufacturing method of high damage threshold laser lens, the method step comprises:

[0054] Step 1: Substrate preparation: Wipe the surface of the fused silica, put the wiped lens into the sheet holder, and put the sheet holder on the workpiece tray of the coating machine; the glass substrate is made of domestic JGS1 grade fused silica, the size is φ25.4* 5mm, the surface shape reaches 1 / 4λ@633nm, and the surface quality is 10-5. Use a solution of 7:3 volume ratio of 100-grade non-woven fabric to wipe the surface, and put the wiped lens into the lens holder. The sheet holder is placed on the workpiece tray of the coating machine.

[0055] Step 2: Preparation before plating: such as figure 1 As shown, the zirconium tin alloy is placed in the acupoint crucible, the background of the vacuum chamber is evacuated, and the zirconium tin alloy is pre-melted several times in batches; 1000g of the zirconium tin alloy with a tin...

Embodiment 3

[0064] like figure 1 Shown, a kind of manufacturing method of high damage threshold laser lens, the method step comprises:

[0065] Step 1: Substrate preparation: Wipe the surface of the fused silica, put the wiped lens into the sheet holder, and put the sheet holder on the workpiece tray of the coating machine; the glass substrate is made of domestic JGS1 grade fused silica, the size is φ25.4* 5mm, the surface shape reaches 1 / 4λ@633nm, and the surface quality is 10-5. Use a 4:1 volume ratio solution of 100-grade non-woven fabric to wipe the surface, and put the wiped lens into the lens holder. The sheet holder is placed on the workpiece tray of the coating machine.

[0066] Step 2: Preparation before plating: such as figure 1 As shown, the zirconium tin alloy is placed in the acupoint crucible, the background of the vacuum chamber is evacuated, and the zirconium tin alloy is pre-melted several times in batches; 1000g of the zirconium tin alloy with a tin content of 0.8% i...

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Abstract

The invention belongs to the field of optical thin films, and relates to a high-damage threshold laser lens and a manufacturing method thereof. The laser lens of the invention comprises a substrate and coating layers. The coating layers alternately form multiple zirconia film layers and multiple silica film layers from the surface of the substrate, and the zirconia film layer adopts zircaloy for coating. The manufacturing method of the invention comprises steps of substrate preparation, pre-coating preparation and coating. According to the high-damage threshold laser lens capable of solving alow damage threshold by direct zirconia material evaporation and the manufacturing method thereof, the damage threshold of the zirconia film layer is raised to17J / cm<2> 10ns-coating 355 nm from 5 J / cm<2> 10ns-coating 355 nm.

Description

technical field [0001] The invention belongs to the field of optical thin films, and relates to a high damage threshold laser lens and a manufacturing method thereof. Background technique [0002] With the rapid development of laser cutting, laser welding and other fields, the output power requirements of lasers are also getting higher and higher. How to improve the damage threshold of laser lenses has always been the direction of thin film researchers. The current domestic process of preparing laser lenses uses alternate coatings of zirconia and silicon dioxide materials to achieve multi-layer film reflection. The existing process is to use electron beams to directly evaporate the zirconia material in a vacuum and high temperature environment, make the material gasify and attach to the glass substrate, and alternately coat with the silicon dioxide material to form a reflection band corresponding to the 355nm band to achieve reflectivity. 99% and damage threshold 5J / cm 2 1...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B1/10G02B5/08C23C14/24C23C14/18C23C14/10
Inventor 姜海刘瑞斌孟欢
Owner 湖南麓星光电科技有限公司
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